2004
DOI: 10.1080/10584580490441692
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Kinetics of Phase Transformations in Lead Scandium Tantalate Thin Films

Abstract: The phase transformations from amorphous to pyrochlore to perovskite in lead scandium tantalate (PST) thin films during rapid thermal annealing process (RTA) have been studied. Volume fractions for pyrochlore and perovskite were obtained from their respective X-ray diffraction intensities. Two models assuming the starting phase being pure amorphous or pyrochlore were analysed in detail. Equations have been derived and numerical calculation used to simulate the volume fractions for each phase as functions of an… Show more

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“…It was found that the films deposited at 550 C consist of a pure perovskite phase and no pyrochlore phase was observed in these films. The pyrochlore phase in PST films has been known for degrading the ferroelectric properties 14 and thus it is unwanted. The films deposited at 575 C and 525 C were found to contain a pyrochlore phase emphasizing that phasepure PST films are confined to a rather narrow window of growth temperature.…”
Section: Resultsmentioning
confidence: 99%
“…It was found that the films deposited at 550 C consist of a pure perovskite phase and no pyrochlore phase was observed in these films. The pyrochlore phase in PST films has been known for degrading the ferroelectric properties 14 and thus it is unwanted. The films deposited at 575 C and 525 C were found to contain a pyrochlore phase emphasizing that phasepure PST films are confined to a rather narrow window of growth temperature.…”
Section: Resultsmentioning
confidence: 99%