Kinetics of reduction of a RuO2(110) film on Ru(0001) by atomic hydrogen

Ugur, D.; Storm, A.J.; Verberk, R.; Brouwer, J.C.; Sloof, Willem G.

doi:10.1016/j.mee.2012.12.031

Cited by 12 publications

(11 citation statements)

References 42 publications

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“…The proposed mechanism of the Ru/C+H 3 PO 4 catalytic system is presented in Figure . During the sorbitol HDO reaction, C−O cleavage occurred by dehydration on the acidic sites to result in the elimination of a molecule of water and the formation of an unsaturated compound that would be hydrogenated on the Ru 0 and RuO x species in the presence of hydrogen . These findings give important insights into the mechanism of HDO over the Ru/C+H 3 PO 4 catalytic system.…”

Section: Resultsmentioning

confidence: 90%

Aqueous‐Phase Hydrodeoxygenation of Biomass Sugar Alcohol into Renewable Alkanes over a Carbon‐Supported Ruthenium with Phosphoric Acid Catalytic System

et al. 2017

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Recently, we demonstrated the catalytic conversion of biomass hydrolysate and real biomass into renewable alkanes over a Ru/C catalyst with aqueous phosphoric acid (Ru/C+H3PO4) and we obtained a high yield of C5/C6 alkanes. In this study, the mechanism of sorbitol hydrodeoxygenation (HDO) into alkanes over the Ru/C+H3PO4 catalytic system was investigated by using a trickle‐bed reactor. A high HDO performance was detected with a large amount of long‐chain alkanes in the products. Subsequently, pre‐ and postcharacterization studies (N2 adsorption, XRD, X‐ray photoelectron spectroscopy, TEM, NH3 temperature‐programmed desorption, H2 temperature‐programmed reduction, FTIR spectroscopy) were performed on the relevant catalysts to study the change of the catalytic active sites. Moreover, mineral acid experiments were performed to study the influence of phosphoric acid on the HDO performance.

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Section: Resultsmentioning

confidence: 90%

Aqueous‐Phase Hydrodeoxygenation of Biomass Sugar Alcohol into Renewable Alkanes over a Carbon‐Supported Ruthenium with Phosphoric Acid Catalytic System

et al. 2017

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“…For O(1 s) peak assignment, we first consider the anhydrous oxide and assign lattice oxygen to the signal at 529.3 eV . The high BE peak (532.3 eV) has previously been assigned to SiO x contamination; however, no Si is detectable in these samples.…”

Section: Resultsmentioning

confidence: 99%

Resolving ruthenium: XPS studies of common ruthenium materials

Morgan

2015

Surface & Interface Analysis

868

573

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X-ray photoelectron spectroscopy (XPS) utilising monochromatic Al Kα radiation has been employed to study metallic ruthenium and the catalytically and technologically important ruthenium compounds RuO 2 , RuCl 3 , Ru(NO)(NO 3 ) 3 and Ru(AcAc) 3 . The results improve on the accuracy of already published Ru(3d) binding energies, expand known Ru(3p) binding energies and also report spin-orbit splitting for the core levels. For RuO 2 , the difference between anhydrous and hydrated samples is explored, and the effect on curve fitting such spectra is discussed. Analysis of RuCl 3 has allowed, for the first time, the positive identification of Ru(OH) 3 by XPS.

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“…The excess energy from the ion dissociates the RuO bond, making OH formation highly probable, a process well known from Ref. 10. The activation energy for this process is 0.48 eV, 10 which means that c ¼ 0.32.…”

Section: Plasma-assisted Ruthenium Reductionmentioning

confidence: 91%

“…[4][5][6][7][8] Atomic hydrogen is currently applied to remove different types of contaminations. 5,9,10 However, atomic hydrogen is not a very effective agent for ruthenium oxide reduction. 10 In the case of exposure to highenergy photons, photoionisation prevents the formation of a high-density flux of H atoms toward the irradiated surface.…”

Section: Introductionmentioning

confidence: 99%

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Plasma-assisted oxide removal from ruthenium-coated EUV optics

Dolgov

Lee

Bijkerk

et al. 2018

Journal of Applied Physics

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An experimental study of oxide reduction at the surface of ruthenium layers on top of multilayer mirrors and thin Ru/Si films is presented. Oxidation and reduction processes were observed under conditions close to those relevant for extreme ultraviolet lithography. The oxidized ruthenium surface was exposed to a low-temperature hydrogen plasma, similar to the plasma induced by extreme ultraviolet radiation. The experiments show that hydrogen ions are the main reducing agent. Furthermore, the addition of hydrogen radicals increases the reduction rate beyond that expected from simple flux calculations. We show that low-temperature hydrogen plasmas can be effective for reducing oxidized top surfaces. Our proof-of-concept experiments show that an in situ, EUV-generated plasma cleaning technology is feasible.

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Kinetics of reduction of a RuO2(110) film on Ru(0001) by atomic hydrogen

Cited by 12 publications

References 42 publications

Aqueous‐Phase Hydrodeoxygenation of Biomass Sugar Alcohol into Renewable Alkanes over a Carbon‐Supported Ruthenium with Phosphoric Acid Catalytic System

Aqueous‐Phase Hydrodeoxygenation of Biomass Sugar Alcohol into Renewable Alkanes over a Carbon‐Supported Ruthenium with Phosphoric Acid Catalytic System

Resolving ruthenium: XPS studies of common ruthenium materials

Plasma-assisted oxide removal from ruthenium-coated EUV optics

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