We have performed KEMS measurements on both congruently and incongruently vaporizing systems. The congruently vaporizing compounds include TeO2(s), MnTe(s), H3BO3(s), and NaBO2(s). The incongruently vaporizing systems include binary tellurides of Fe, Cr, Ni, Mo, Mn, and the ternary Mn-Te-O. The various aspects concerning the vaporization behavior of these systems will be presented in this paper.