Ku-Band Six-Bit RF MEMS Time Delay Network

Nordquist, Christopher; Dyck, Christopher William; Kraus, G.M.; Sullivan, Charles T.; Austin, Franklin; Finnegan, Patrick Sean; Ballance, Mark Harry

doi:10.1109/csics.2008.29

Cited by 13 publications

(3 citation statements)

References 6 publications

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“…Different narrow-band and wide-band phase shifters are reported in the literature [6][7][8][9][10][11][12][13][14][15][16][17][18][19][20][21][22][23]. Reflection type phase shifter is reported with an average insertion loss and phase error of 3.5 dB and 4.9°, respectively, over 15-45 GHz [6].…”

Section: Introductionmentioning

confidence: 99%

Ku to V-band 4-bit MEMS phase shifter bank using high isolation SP4T switches and DMTL structures

Dey

Koul

Poddar

et al. 2017

J. Micromech. Microeng.

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A few corrections have been made in this manuscript; as follows:1. The measurement results in figure 3(c) were wrong; the correct version is given below.In reference to figure 3(c), we also correct the statement made in page 3, in the first column, third paragraph, and first line as given below:Measured V p and release (V r ) voltages are in the range of 84-109 V and it was depicted from the capacitance variations between the control electrode and the beam (figure 3(c)).We also correct the second sentence in page 3, first column, and third paragraph as given:Measured ON-time of 12.6-9.5 µs with OFF-time of 6.8 µs was obtained at 108-120 V bias.2. The measurement results for figure 4(a) were wrong; the correct version is given above.In reference to figure 4(a), we also correct the statement made in page 3, first column, third paragraph, and third line as given below:

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Section: Introductionmentioning

confidence: 99%

Ku to V-band 4-bit MEMS phase shifter bank using high isolation SP4T switches and DMTL structures

Dey

Koul

Poddar

et al. 2017

J. Micromech. Microeng.

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show abstract

“…The RF-MEMS phase shifters concepts operating at K and Ka frequency bands are designed capitalizing on True-Time Delay (TTD) technology [9][10][11][12][13][14][15] and are manufactured in the surface micromachining technology available at Fondazione Bruno Kessler (FBK) in Italy [16]. The resulting phase delay is defined by the lengths of the transmission lines.…”

Section: Rf-mems Phase Shifter: Design Concept and Simulationsmentioning

confidence: 99%

RF-MEMS Monolithic K and Ka Band Multi-State Phase Shifters as Building Blocks for 5G and Internet of Things (IoT) Applications

Iannacci

Resta

Bagolini

et al. 2020

Sensors

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RF-MEMS, i.e., Micro-Electro-Mechanical Systems (MEMS) for Radio Frequency (RF) passive components, exhibit interesting characteristics for the upcoming 5G and Internet of Things (IoT) scenarios, in which reconfigurable broadband and frequency-agile devices, like high-order switching units, tunable filters, multi-state attenuators, and phase shifters will be necessary to enable mm-Wave services, small cells, and advanced beamforming. In particular, satellite communication systems providing high-speed Internet connectivity utilize the K and Ka bands, which offer larger bandwidth compared to lower frequencies. This paper focuses on two design concepts of multi-state phase shifter designed and manufactured in RF-MEMS technology. The networks feature 4 switchable stages (16 states) and are developed for the K and Ka bands. The proposed phase shifters are realized in a surface micromachining RF-MEMS technology and the experimentally measured parameters are compared with Finite Element Method (FEM) multi-physical electromechanical and RF simulations. The simulated phase shifts at both the operating bands fit well the measured value, despite the measured losses (S21) are larger than 5–7 dB if compared to simulations. However, such a non-ideality has a technological motivation that is explained in the paper and that will be fixed in the manufacturing of future devices.

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“…Different types of phase shifters have been reported in the literature over last two decades [6][7][8][9][10][11][12][13][14][15][16][17][18][19][20][21][22][23] in narrowband or wideband. One of the major challenges of a wideband phase shifter is to track any frequency over a wide spectrum without compromising other performances like loss, matching, and phase error.…”

Section: Introductionmentioning

confidence: 99%

17-30 GHZ Reliable and Compact Analog Phase Shifter Using Lateral Micromachined Sp7t Switches, and DMTL Arrays

Dey¹,

Koul²,

Poddar³

et al. 2021

PIER C

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Ku-Band Six-Bit RF MEMS Time Delay Network

Cited by 13 publications

References 6 publications

Ku to V-band 4-bit MEMS phase shifter bank using high isolation SP4T switches and DMTL structures

Ku to V-band 4-bit MEMS phase shifter bank using high isolation SP4T switches and DMTL structures

RF-MEMS Monolithic K and Ka Band Multi-State Phase Shifters as Building Blocks for 5G and Internet of Things (IoT) Applications

17-30 GHZ Reliable and Compact Analog Phase Shifter Using Lateral Micromachined Sp7t Switches, and DMTL Arrays

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