“…5) The MEMS switch device has superior performance in terms of insertion loss, signal distortion, and power consumption to conventional semiconductor switches using p-i-n diodes 6,7) or GaAs field effect transistors (FETs). 8,9) Various kinds of circuit topologies have been applied in MEMS switch base phase shifters so far, for example, switched-line, [10][11][12] loaded-line, 13,14) reflection 15,16) and distributed-transmission-line [17][18][19][20][21] phase shifters. However, these circuit topologies are concerned with higher-frequency operation or multiple-function capability.…”