1979
DOI: 10.1063/1.90649
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LaF3 insulators for MIS structures

Abstract: Thin films of LaF 1 deposited on Si or GaAs substrates have been observed to form blocking contacts with very high capacitances. This results in comparatively-hysteresisfree and sharp C-V (capacitance-voltage) characteristics for MIS structures. Such structures have been used to study the interface states of GaAs with increased resolution and to construct improved photocapacitive infrared detectors.

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Cited by 11 publications
(5 citation statements)
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“…The permittivity is close to the bulk value of 14. [59] The leakage current density versus electric field is depicted in Figure 10. The catastrophic breakdown occurred at electric field values of À1.8 and þ2.3 MV cm…”
Section: Film Propertiesmentioning
confidence: 99%
“…The permittivity is close to the bulk value of 14. [59] The leakage current density versus electric field is depicted in Figure 10. The catastrophic breakdown occurred at electric field values of À1.8 and þ2.3 MV cm…”
Section: Film Propertiesmentioning
confidence: 99%
“…28 LaF 3 is an ionic conductor at room temperature where the mobile carriers are fluorine ion vacancies. 28 Like liquid or ion-gel electrolytes previously employed to gate graphene, 13,29 LaF 3 can induce larger electrostatic doping than dielectric oxides. A LaF 3 film forms a thin dipole layer at its surface that produces a large capacitance, which can be effectively treated as that of a 10−20 nm thick insulating layer (independent of the actual film thickness) with a dielectric constant of 14.…”
mentioning
confidence: 99%
“…A LaF 3 film forms a thin dipole layer at its surface that produces a large capacitance, which can be effectively treated as that of a 10−20 nm thick insulating layer (independent of the actual film thickness) with a dielectric constant of 14. 28 This work assumed 10 nm for the insulator's effective thickness. Graphene was covered with a thin film of insulating poly(methyl methacrylate) (PMMA) with varying thicknesses.…”
mentioning
confidence: 99%
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