Lamellar grating optimization for miniaturized fourier transform spectrometers

Ferhanoğlu, Onur; Seren, Hüseyin R.; Lüttjohann, Stephan; Ürey, Hakan

doi:10.1364/oe.17.021289

Cited by 22 publications

(31 citation statements)

References 8 publications

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“…For wavelengths longer than max , a cavity effect starts decreasing the modulation depth of the THz waves, which are polarized parallel to the fringes. The high-frequency limit for this geometry is 30 mm (corresponding to 10 THz), which is determined by diffraction theory and depends on the geometry of the device (Strong & Vanasse, 1960;Naftaly et al, 2008;Ferhanoglu et al, 2009): min = hs/f, where f = 130 mm is the focal length of the parabolic mirror and s = 2 mm is the width of the exit slit of the detector (defined by the detector effective aperture).…”

Section: Thz Spectrum Measurementmentioning

confidence: 99%

Photon diagnostics at the FLASH THz beamline

Pan

Zapolnova

Golz

et al. 2019

J Synchrotron Radiat

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The THz beamline at FLASH, DESY, provides both tunable (1–300 THz) narrow-bandwidth (∼10%) and broad-bandwidth intense (up to 150 uJ) THz pulses delivered in 1 MHz bursts and naturally synchronized with free-electron laser X-ray pulses. Combination of these pulses, along with the auxiliary NIR and VIS ultrashort lasers, supports a plethora of dynamic investigations in physics, material science and biology. The unique features of the FLASH THz pulses and the accelerator source, however, bring along a set of challenges in the diagnostics of their key parameters: pulse energy, spectral, temporal and spatial profiles. Here, these challenges are discussed and the pulse diagnostic tools developed at FLASH are presented. In particular, a radiometric power measurement is presented that enables the derivation of the average pulse energy within a pulse burst across the spectral range, jitter-corrected electro-optical sampling for the full spectro-temporal pulse characterization, spatial beam profiling along the beam transport line and at the sample, and a lamellar grating based Fourier transform infrared spectrometer for the on-line assessment of the average THz pulse spectra. Corresponding measurement results provide a comprehensive insight into the THz beamline capabilities.

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Section: Thz Spectrum Measurementmentioning

confidence: 99%

Photon diagnostics at the FLASH THz beamline

Pan

Zapolnova

Golz

et al. 2019

J Synchrotron Radiat

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“…For more accurate results, we simulated the diverging light source composed of superposed discrete plane waves at sample angles. Resulting spectrum contains valuable information about the optical design performance such as measurement resolution or signal strength [1]. We defined the maximum width of the grating as 5 mm and the maximum traveled distance of the moving grating set as 500 µm.…”

Section: Optical Simulation Resultsmentioning

confidence: 99%

“…To achieve very high deflections while keeping dynamic deformation at low levels, much attention has been paid to the design of the pantograph inspired hinges. The present optical design (Section 2) is largely based on the work previously done by our group in [1]. Mechanical design that is further developed compared to our previous work [4,5] is explained in section 3, followed by characterization results in section 4.…”

Section: Introductionmentioning

confidence: 99%

MEMS Fourier Transform Spectrometer

Seren

Ayerden

Holmström

et al. 2011

2011 XXXth URSI General Assembly and Scientific Symposium

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A comb actuated lamellar grating interferometer based MEMS Fourier Transform Infrared (FTIR) Spectrometer device is designed, fabricated and characterized. The device operates at out-of-plane resonant mode which will allow ultra miniaturized, sensitive, robust, and fast spectrometers. As a novel approach pantograph type springs are used in the mechanical design to achieve high deflections. The dynamic deformation on the gratings is minimized using additional suspension springs. Optical simulations are conducted to extensively analyze the device performance in terms of spectral resolution and signal-to-bias ratio (SBR). In the light of simulations and experiments, the grating geometry is optimized for the region of wavelengths of interest (2.5-16 µm). Comb structures are designed and placed around pantograph springs for low voltage operation. The fabrication process is developed based on CMOS compatible bulk micromachining of a silicon-on-insulator wafer. A maximum peak to peak mechanical deflection of 478 µm is acquired with 50 V p-p input voltage in ambient pressure.

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“…Fourier transform infrared spectrometers (FTIR, or more generally FTS) are a type of powerful instruments for chemical and biological sensing. An FTS obtains spectrograms through the Fourier transform of the interferograms generated by an interferometer (Michelson interferometer and lamellar grating interferometer as the two main types) [1]. The spectral ranges of FTS systems can extend from visible to NIR or even MIR.…”

Section: Introductionmentioning

confidence: 99%

Review of MEMS Based Fourier Transform Spectrometers

et al. 2020

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Fourier transform spectrometers (FTS), mostly working in infrared (IR) or near infrared (NIR) range, provide a variety of chemical or material analysis with high sensitivity and accuracy and are widely used in public safety, environmental monitoring and national border security, such as explosive detection. However, because of being bulky and expensive, they are usually used in test centers and research laboratories. Miniaturized FTS have been developed rapidly in recent years, due to the increasing demands. Using micro-electromechanical system (MEMS) micromirrors to replace the movable mirror in a conventional FTS system becomes a new realm. This paper first introduces the principles and common applications of conventional FTS, and then reviews various MEMS based FTS devices.

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Lamellar grating optimization for miniaturized fourier transform spectrometers

Cited by 22 publications

References 8 publications

Photon diagnostics at the FLASH THz beamline

Photon diagnostics at the FLASH THz beamline

MEMS Fourier Transform Spectrometer

Review of MEMS Based Fourier Transform Spectrometers

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