Langmuir Probe Diagnostics for Medium Pressure and Magnetised Low-Temperature Plasma

Tichý, M.; Kudrna, P.; Behnke, J. F.; Csambal, C.; Klagge, S.

doi:10.1051/jp4:1997432

Cited by 22 publications

(35 citation statements)

References 26 publications

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“…They were oriented parallel to B 0 to measure the perpendicular component of electron temperature. Research by Aikawa, 20 Amemiya et al, 21 Himmel et al, 22 and Tichy et al 23 have verified the use of these probe methods for perpendicular and parallel electron temperature measurements in high density electron cyclotron resonance plasmas.…”

Section: B Diagnostic Probes 1 Langmuir Probesmentioning

confidence: 99%

Helicon experiments and simulations in nonuniform magnetic field configurations

et al. 1999

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Wave, antenna impedance, plasma density, and temperature anisotropy measurements are carried out for a helicon plasma source in nonuniform and uniform static magnetic fields. Strong axial density gradients associated with the nonuniform magnetic fields are observed to affect wave fields, absorption, and source efficiency. The wave field and antenna input impedance measurements are compared with a new simulation code which also calculates Poynting power flow and wave absorption profiles. Wave amplitude measurements are shown to decay more rapidly and the phase velocity varies over a wide range for the nonuniform static magnetic field case.

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Section: B Diagnostic Probes 1 Langmuir Probesmentioning

confidence: 99%

Helicon experiments and simulations in nonuniform magnetic field configurations

et al. 1999

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“…The plasma density is determined from the ion current using the results of the modified TALBOT and CHOU model. 31,32 In order to prevent the dust particle deposition on the probe, 33,34 the probe tip is maintained at a potential much less than the floating potential by using a DC power supply. A single cycle triangular waveform is superposed on the DC bias at a frequency of 200 Hz to acquire the I-V characteristics.…”

Section: Experimental Set Upmentioning

confidence: 99%

Observation of dust torus with poloidal rotation in direct current glow discharge plasma

et al. 2015

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Observation of dust cloud rotation in parallel-plate DC glow discharge plasma is reported here. The experiments are carried out at high pressures ($130 Pa) with a metallic ring placed on the lower electrode (cathode). The dust cloud rotates poloidally in the vertical plane near the cathode surface. This structure is continuous toroidally. Absence of magnetic field rules out the possibility of E Â B induced ion flow as the cause of dust rotation. The dust rotational structures exist even with water cooled cathode. Therefore, temperature gradient driven mechanisms, such as thermophoretic force, thermal creep flow, and free convection cannot be causing the observed dust rotation. Langmuir probe measurement reveals the existence of a sharp density gradient near the location of the rotating dust cloud. The gradient in the density, giving rise to a gradient in the ion drag force, has been identified as the principal cause behind the rotation of dust particles. V C 2015 AIP Publishing LLC. [http://dx.

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“…Measured probe characteristics were evaluated under collisionless space charge sheath conditions because high-density HiPIMS plasma implies Debye length in the order of tens of µm whilst the mean free path of neutral-charged particle collision is in order of tens of mm [33]. The measured I-V characteristics were evaluated by using an in-house developed Langmuir probe software [34,35]. The software calculates the second derivative of the Langmuir probe characteristics numerically using the 'sliding polynomial approximation' method.…”

Section: Langmuir Probe Measurementmentioning

confidence: 99%

Plasma Diagnostics in Reactive High-Power Impulse Magnetron Sputtering System Working in Ar + H2S Gas Mixture

et al. 2020

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A reactive high-power impulse magnetron sputtering system (HiPIMS) working in Ar + H 2 S gas mixture was investigated as a source for the deposition of iron sulfide thin films. As a sputtering material, a pure Fe target was used. Plasma parameters in this system were investigated by a time-resolved Langmuir probe, radio-frequency (RF) ion flux probe, quartz crystal monitor modified for measurement of the ionized fraction of depositing particles, and by optical emission spectroscopy. A wide range of mass flow rates of reactive gas H 2 S was used for the investigation of the deposition process. It was found that the deposition rate of iron sulfide thin films is not influenced by the flow rate of H 2 S reactive gas fed into the magnetron discharge although the target is covered by iron sulfide compound. The ionized fraction of depositing particles decreases from r ≈ 40% to r ≈ 20% as the flow rate of H 2 S, Q H 2 S , changes from 0 to 19 sccm at the gas pressure around p ≈ 1 Pa in the reactor chamber. The electron concentration n e measured by the Langmuir probe at the position of the substrate decreases over this change of Q H 2 S from 10 18 down to 10 17 m −3Coatings 2020, 10, 246 2 of 16 realized. Furthermore, FeS films were found to be excellent low-friction materials working like solid state lubricants in tribological applications [16].High-power impulse magnetron sputtering system (HiPIMS) is a relatively novel approach for the deposition of thin films [17][18][19][20]. This method utilizes very high discharge current densities during the pulse j D > 1 A cm −2 , but, simultaneously, average power applied in the HiPIMS discharge is similar to DC magnetron sputtering. These conditions result in a high degree of ionization of sputtered particles. Thus, the deposited films have higher density, better adhesion, and 3D objects such as trenches, etc. and can be more uniformly coated as well [21][22][23]. Recently, reactive HiPIMS in various gas mixtures has been used for the deposition of oxides, nitrides, and other materials [24][25][26][27][28][29][30][31].In this paper, we will present the first study of plasma parameters in the reactive HiPIMS in Ar + H 2 S gas mixture whose results could be further used for the optimization of deposition of iron sulfide thin films or other types of sulfides. ExperimentalThe experimental setup of the reactive HiPIMS in Ar + H 2 S gas mixture can be seen in Figure 1. The system is equipped with a pure iron Fe target with an outer diameter of 50 mm and a thickness of 0.8 mm. The stainless-steel reactor vacuum chamber is continuously pumped by a combination of turbomolecular (pumping speed S t = 250 L·s −1 ) and rotary vane pumps (pumping speed S r = 25 m 3 h −1 ). The gas flow rates of Ar (99.9999%) and pure H 2 S (99.5%) are independently controlled by two mass flow controllers. It is useful to note that H 2 S is an inflammable and highly toxic gas. Consequently, the use of H 2 S in a laboratory is subject to approval by a respective official body. The pressure in the reactor cham...

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Langmuir Probe Diagnostics for Medium Pressure and Magnetised Low-Temperature Plasma

Cited by 22 publications

References 26 publications

Helicon experiments and simulations in nonuniform magnetic field configurations

Helicon experiments and simulations in nonuniform magnetic field configurations

Observation of dust torus with poloidal rotation in direct current glow discharge plasma

Plasma Diagnostics in Reactive High-Power Impulse Magnetron Sputtering System Working in Ar + H2S Gas Mixture

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