Langmuir probe diagnostics of a plasma jet system

Tichý, M.; Hubička, Zdeněk; Šı́cha, M.; Čada, Martin; Olejníček, J.; Churpita, O.; Jastrabı́k, L.; Virostko, P.; Adámek, Petr; Kudrna, P.; Leshkov, S.; Chichina, M.; Kment, Štěpán

doi:10.1088/0963-0252/18/1/014009

Cited by 37 publications

(34 citation statements)

References 43 publications

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“…Maximal values of the electron density are in the order of almost 10 18 m −3 . They are considerably higher than the values obtained in continuous DC regime during earlier measurements [10]. The course of the decay of the electron density does not correspond with the pure ambipolar diffusion to the walls because that should at constant electron temperature yield an exponential decline.…”

Section: Resultscontrasting

confidence: 71%

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A Study of Plasma Parameters in Hollow Cathode Plasma Jet in Pulse Regime

Kudrna

Klusoň

Leshkov

et al. 2010

Contrib. Plasma Phys.

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The pulsed DC hollow cathode discharge has been studied in the low pressure plasma jet sputtering system by means of cylindrical Langmuir probe. Measurements have been performed in pure Ar with the flow rate of 30 sccm. The repetition frequency of the pulses of 1 kHz has been chosen with the pulse width 100 μs (duty cycle 10 %) and 50 μs (duty cycle 5 %) and the amplitude of the pulses was approximately 400 V. The average discharge current varied between 150 and 250 mA. To obtain better stability of the discharge a 3.8 kΩ resistor was connected across the pulse switch. Consequently, there was a weak continuous DC discharge on the background of the pulsed discharge. From the probe characteristics the plasma and floating potential, electron density and electron temperature have been evaluated. Their dependences on the pressure (in the range of several Pa) and on the radial distance from the central axis of the system are presented. Temporal resolution of the measurements is 0.5 μs.

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Section: Resultscontrasting

confidence: 71%

“…That is much higher density than that obtained in earlier measurements in continuous regime of DC discharge excitation in similar system [10]. The measured decay of the electron density is influenced by the weak continuous DC discharge, which is necessary for keeping the discharge stable.…”

Section: Resultscontrasting

confidence: 51%

A Study of Plasma Parameters in Hollow Cathode Plasma Jet in Pulse Regime

Kudrna

Klusoň

Leshkov

et al. 2010

Contrib. Plasma Phys.

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“…The electron density estimation agrees well with the value obtained from the discharge resistivity. It has to be mentioned here that, even though there are some works related to the application of probes in high pressure plasmas, at the present moment the use of electrical probes to diagnose APPJs is not well established due the fact that information from the probe is strongly affected by collisions of charged particles in the probe sheath [18,19].…”

Section: Electrical Probesmentioning

confidence: 99%

Electron density measurement in atmospheric pressure plasma jets: Stark broadening of hydrogenated and non-hydrogenated lines

Nikiforov

Leys

González

et al. 2015

Plasma Sources Sci. Technol.

205

179

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Electron density is one of the key parameters in the physics of a gas discharge. In this contribution the application of the Stark broadening method to determine the electron density in low temperature atmospheric pressure plasma jets is discussed. An overview of the available theoretical Stark broadening calculations of hydrogenated and non-hydrogenated atomic lines is presented. The difficulty in the evaluation of the fine structure splitting of lines, which is important at low electron density, is analysed and recommendations on the applicability of the method for low ionization degree plasmas are given. Different emission line broadening mechanisms under atmospheric pressure conditions are discussed and an experimental line profile fitting procedure for the determination of the Stark broadening contribution is suggested. Available experimental data is carefully analysed for the Stark broadening of lines in plasma jets excited over a wide range of frequencies from dc to MW and pulsed mode. Finally, recommendations are given concerning the application of the Stark broadening technique for the estimation of the electron density under typical conditions of plasma jets.

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“…This local maximum and in fact the whole time evolution of j i corresponds to the time evolution of electron density n e at the position of a substrate in the pulsed DC HCPJ, which was studied in [11]. In [11] it was suggested that the local maximum of n e in the transient region can be caused by a short amplification of the auxiliary RF discharge. The hypothesis is following: the auxiliary RF discharge is immediately enhanced by application of high voltage to the nozzle at the start of the discharge pulse, while the hollow cathode discharge does not burn yet.…”

Section: Resultsmentioning

confidence: 96%

“…From the known distance of the probe from the nozzle this velocity can be estimated to be 600 m·s −1 . The propagation of the plasma from the nozzle can be also observed on the plasma parameters measured in [11] by a Langmuir probe at two different distances downstream from the nozzle, although the propagation was not discussed there. The velocity of the propagation estimated from the mentioned measurements in [11] is 800 m·s −1 , i.e.…”

Section: Rf Discharge Extinguishes (The Rf-formed Bias Ceases)mentioning

confidence: 99%

Ion current to a substrate in the pulsed dc hollow cathode plasma jet deposition system

Virostko¹,

Hubička²,

Čada³

et al. 2010

J. Phys. D: Appl. Phys.

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HAL is a multi-disciplinary open access archive for the deposit and dissemination of scientific research documents, whether they are published or not. The documents may come from teaching and research institutions in France or abroad, or from public or private research centers. L'archive ouverte pluridisciplinaire HAL, est destinée au dépôt et à la diffusion de documents scientifiques de niveau recherche, publiés ou non, émanant des établissements d'enseignement et de recherche français ou étrangers, des laboratoires publics ou privés.Ion current to a substrate in the pulsed dc hollow cathode plasma jet deposition systemTo cite this version: Abstract. The current of positive ions to a substrate was studied in the pulsed DC hollow cathode plasma jet system for deposition of thin films working at low pressures. Time evolution of electric current to a planar probe with pulsed negative DC bias was measured. The pulsing of the bias of the probe was applied to allow measurements with a dielectric film being deposited on its surface. The frequency of pulsing of the probe bias was higher than the frequency of pulsing of the discharge. Time evolution of the ion current density to the probe j i was determined for the whole period of modulation of the discharge for the discharge repetition frequency 2.5 kHz and different duty cycles D. The mean ion current density j i , averaged over the whole period of the discharge, was rising with the decreasing D although the value of the mean discharge current was kept constant. A simple theoretical model is proposed to explain this effect. It is shown that the observed rise of j i with decreasing D is in major part caused by the rise of the ion current in the afterglow region of the pulsed discharge.

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Langmuir probe diagnostics of a plasma jet system

Cited by 37 publications

References 43 publications

A Study of Plasma Parameters in Hollow Cathode Plasma Jet in Pulse Regime

A Study of Plasma Parameters in Hollow Cathode Plasma Jet in Pulse Regime

Electron density measurement in atmospheric pressure plasma jets: Stark broadening of hydrogenated and non-hydrogenated lines

Ion current to a substrate in the pulsed dc hollow cathode plasma jet deposition system

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