Langmuir probe measurements in an inductively coupled plasma source

Schwabedissen, A.; Benck, Eric C.; Roberts, James R.

doi:10.1103/physreve.55.3450

Cited by 114 publications

(89 citation statements)

References 31 publications

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“…From the slope in figure 4(b) one can calculate the inductance which is L II = 1.4 μH. This value is important for different numerical simulations and is comparable with the literature [26,30,43,46,48]. For the determination of the absorbed power P abs , the coil resistance R coil have to be determined [49].…”

Section: Voltage and Current Probe Measurementsmentioning

confidence: 97%

E‐H Transition in Argon/Oxygen Inductively Coupled RF Plasmas

Wegner

Küllig

Meichsner

2015

Contrib. Plasma Phys.

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This contribution presents results of comprehensive investigation of the E-H transition in an inductively coupled radio frequency argon/oxygen discharge at 13.56 MHz. For the characterization of the discharge arrangement, the spatial magnetic and electric field components of the planar coil in vacuum are calculated and provide information about the electron heating region. The used double coil leads to a radial symmetric field distribution. Further, voltage and current probe measurements reveal the inductivity of the coil and the phase shift between the coil voltage and the current. As a result, the coil current and the RF voltage are directly proportional. The phase shift is nearly constant in the E-mode and decreases slightly in the H-mode. The positive ion saturation current as well as the line integrated electron density are measured by means of Langmuir probe and 160 GHz microwave interferometer, respectively, to study the mode transition in argon with different oxygen contents. The positive ion saturation current and the electron density decrease with increasing oxygen admixture at fixed pressure and RF power. The onset and the way of the E-H transition strongly depend on the oxygen content. The mode transition of a pure argon discharge is step like and changes to a continuous mode transition with the admixture of oxygen.

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Section: Voltage and Current Probe Measurementsmentioning

confidence: 97%

E‐H Transition in Argon/Oxygen Inductively Coupled RF Plasmas

Wegner

Küllig

Meichsner

2015

Contrib. Plasma Phys.

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“…2,7,8 Several attempts have been made to measure the electrical and plasma characteristics of inductive discharges. [7][8][9][10][11][12][13][14] These parameters were obtained for different reactor configurations, of different sizes, operational under different gas types and pressures, at different driving frequencies. To propose an ICP scaling law based on these measurements is difficult because its characteristics are device specific.…”

Section: Introductionmentioning

confidence: 99%

Electrical characterization of an inductively coupled gaseous electronics conference reference cell

Singh

Pargmann

2008

Journal of Applied Physics

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Plasma parameters and particularly the external electrical operational parameters are examined with respect to mode transition and hysteresis. The external electrical parameters such as antenna current ͑I c ͒ and antenna voltage ͑V c ͒ amplitudes are measured after the matching network and discussed for an inductively coupled argon discharge. A wide range of discharge conditions by varying applied power ͑up to 150 W at 13.56 MHz͒, gas pressure ͑0.7-7.5 Pa͒, and electrostatic coupling strength are measured for a gaseous electronics conference radio frequency reference cell. The effect on the power coupling efficiency by varying electrostatic coupling strength is studied via implementing two distinct grounded Faraday shields, in addition to the original nonshielded condition. A brief discussion on the evolution of floating potential, plasma potential, electron density, and electron energy distribution function with power and pressure is also presented mainly in context to mode transitions and hysteresis. Relatively smooth transitions in the plasma parameters and in the external electrical parameters are measured close to H to E mode transition region. Contrary to plasma parameters, however, the reverse transition from E to H mode was found to be abrupt in external parameters. The plasma parameters are measured using a commercial Langmuir probe, whereas the antenna currents and voltages are measured using a homebuilt Rogowski coil and capacitor divider, respectively.

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“…Figure 3 shows the electron energy probability function (EEPF) at several pressures at the input power of 600 W. The EEPFs are in a strict manner non-Maxwellian for the entire energy range. Especially non-Maxwellian EEPFs were observed for all energies above the energy range for elastic collisions [29]. However, in a rough manner, we can state that at low pressure, the EEPF is close to a Maxwellian.…”

Section: Methodsmentioning

confidence: 95%

Comparison of Two Methods of Interpretation of LangmuirProbe Data for an Inductively Coupled Oxygen Plasma

Chung¹,

Shin

Seo

2006

Contrib. Plasma Phys.

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The Langmuir probe technique has some drawback in applying to electronegative plasma since it is difficult to interpret the probe I − V data. The positive ion flux to the probe is modified due to the presence of negative ions. In this study, an inductively coupled oxygen RF plasma is employed to perform the Langmuir probe measurement of the electronegative discharge. Plasma parameters are obtained from Langmuir probe measurement using two different methods which are based on electron energy distribution function (EEDF) integrals, and the method based on the fluid model for the modified ion flux, respectively. The EEDF is measured by a double differentiation of the I − V characteristics according to the Druyvesteyn formula. The electron densities estimated based on the two methods are compared. The EEDF integral method gives little higher values than the modified ion flux method. It is observed that at low pressure the EEDF is close to a Maxwellian. Generally, as the pressure increases, the distributions switch to bi-Maxwellian and to Druyvesteyn, and suggest some depletion of electrons with larger energies.

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Langmuir probe measurements in an inductively coupled plasma source

Cited by 114 publications

References 31 publications

E‐H Transition in Argon/Oxygen Inductively Coupled RF Plasmas

E‐H Transition in Argon/Oxygen Inductively Coupled RF Plasmas

Electrical characterization of an inductively coupled gaseous electronics conference reference cell

Comparison of Two Methods of Interpretation of LangmuirProbe Data for an Inductively Coupled Oxygen Plasma

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