2012
DOI: 10.1088/0963-0252/21/2/025004
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Langmuir probe measurements of the electron energy distribution function in magnetized gas discharge plasmas

Abstract: Electron energy distribution functions (EEDF) in argon RF plasmas have been measured by using an improved driven probe. The presence of RF potential fluctuations between probe and plasma distorts a Langmuir probe characteristic. Therefore it introduces large errors into plasma parameters. The improved method, which removes the effect of the RF fluctuation on probe characteristics, consists of superimposing the fluctuation of the space potential measured by an emissive probe to the dc voltage applied to the pro… Show more

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Cited by 53 publications
(59 citation statements)
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“…There are more complicated Langmuir probe theories for magnetized electron collection that may yield a more accurate plasma potential. [28][29][30] However, they are prohibitively difficult to implement in the mapping of a ring-cusp discharge since the magnetic field strength and orientation vary significantly throughout the chamber. In addition, the errors associated with the probe analysis are systematic and the results are sufficient for a qualitative comparison between the various discharge conditions.…”
Section: Discharge Mappingmentioning
confidence: 99%
“…There are more complicated Langmuir probe theories for magnetized electron collection that may yield a more accurate plasma potential. [28][29][30] However, they are prohibitively difficult to implement in the mapping of a ring-cusp discharge since the magnetic field strength and orientation vary significantly throughout the chamber. In addition, the errors associated with the probe analysis are systematic and the results are sufficient for a qualitative comparison between the various discharge conditions.…”
Section: Discharge Mappingmentioning
confidence: 99%
“…Moreover, Eq. (36) (directly linked to the Druyvesteyn formula [36,40,45,46]) is the diffusionless limit of Eq. (35).…”
Section: B Corrections For the Langmuir Probes Interpretationsmentioning
confidence: 99%
“…[17,18,44] where bi-modal distribution functions (distribution function of 2 populations of particles at different temperatures) have been used. Other results are published in the literature describing effects of non-Maxwellians on the Langmuir probe measurements [36][37][38][39][40][41][42][43][44][45][46][47]. The bi-modal approximation is the first efficient way to describe NMDFs, but it assumes the superposition of two populations of particles at the Maxwellian equilibrium and the self-consistency is very restricted since in this bi-modal description the plasma is enough collisional to assure a MDF for each species but do not allow collisions between these two populations.…”
mentioning
confidence: 99%
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“…The I-V curves of collecting probes provide information about parameters such as the local plasma potential, the electron or ion temperatures and the charged species density [131][132][133]. These probes are widely used for the diagnostics of fully [134][135][136] and weakly ionized plasmas [137][138][139]. Theoretically, the operation of Langmuir probes does not depend on the shape of the signal used to bias the probe.…”
Section: Analysis Of Certain Discrepancies On the Characterisation Ofmentioning
confidence: 99%