2020
DOI: 10.1063/5.0010266
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Langmuir probe, optical, and mass characterization of a DC CO2–H2 plasma

Abstract: We present a detailed Langmuir probe, optical emission spectroscopy (OES), and quadrupole mass spectrometry (QMS) characterization of a DC CO2–H2 plasma mixture, complemented by calculations of the electron energy distribution functions (EEDFs) and ionization rates of CO2 plasma with varying H2 ratios using Boltzmann equation (BE) solver BOLSIG+, assuming a bi-Maxwellian distribution. Both the measured and calculated EEDFs as a function of the H2 concentration agreed well and showed a bi-Maxwellian distributio… Show more

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Cited by 4 publications
(2 citation statements)
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“…The H α line (3d 2 D → 2p 2 P 0 ) was produced at 656.7 nm. Since H 2 possesses the most abundant content and the lowest dissociation energy (only 4.48 eV), the H α line exhibits a high-intensity spectrum, suggesting H 2 decomposition under the applied plasma. We observed about 5.5 times higher H α line emission intensity for the optimized discharge system SC-DR-HCDM than other low-dielectric systems, indicating the H 2 dissociation in the enhanced volumetric discharge by increasing the permittivity as well as the streamer space ratio proceeds more thoroughly.…”
Section: Resultsmentioning
confidence: 99%
“…The H α line (3d 2 D → 2p 2 P 0 ) was produced at 656.7 nm. Since H 2 possesses the most abundant content and the lowest dissociation energy (only 4.48 eV), the H α line exhibits a high-intensity spectrum, suggesting H 2 decomposition under the applied plasma. We observed about 5.5 times higher H α line emission intensity for the optimized discharge system SC-DR-HCDM than other low-dielectric systems, indicating the H 2 dissociation in the enhanced volumetric discharge by increasing the permittivity as well as the streamer space ratio proceeds more thoroughly.…”
Section: Resultsmentioning
confidence: 99%
“…Previous research on CO 2 /H 2 plasma confirms that the mixing of CO 2 and H 2 directly influences the plasma parameters and results in a large fraction of H atoms and carboxyl precursor species [13,14]. Both optical emission spectroscopy and quadrupole mass spectrometry can detect H species (through the lines Hα, Hβ, and Hγ), CO, CO 2 , CO 2 + , O 2 , OH, O, C 2 , CO, and CO + [15,16]. These plasma components provide many possibilities for optimizing the surface properties and electronic structure of polymer semiconductors towards rational carboxyl-defective modification, but have not been studied in the rational design and synthesis of functional group defect-endowed g-C 3 N 4 .…”
Section: Introductionmentioning
confidence: 97%