Ordered metal nanoparticle arrays have attracted considerable attention as promising substrates for surface-enhanced Raman spectroscopy owing to their dense and homogeneous distribution of "hot spots". However, achieving uniformity and stability in these structures remains challenging. In this study, we fabricated an Ag nanoparticle array (NPA)/monolayer MoS 2 hybrid using an anodized aluminum template and a wet transfer method. The Ag NPA/MoS 2 hybrid, after annealing at 290 °C, displayed exceptional sensitivity in detecting rhodamine 6G at concentrations as low as 10 −12 M. This enhancement can be attributed to the enhanced coupling effect between the Ag nanoparticle arrays and MoS 2 , alongside the optimization of the Ag nanoparticle morphology. Moreover, the hybrid substrate annealed at 290 °C demonstrated outstanding reproducibility in both point-to-point and substrate-to-substrate measurements, with relative standard deviations of 5.39 and 7.24%, respectively. These findings highlight the potential of the Ag NPA/MoS 2 hybrid for trace detection applications in food and environmental safety.