Large‐Area Fabrication of High‐Performance Flexible and Wearable Pressure Sensors

Abstract

Flexible pressure sensors with high sensitivity, broad working range, and good scalability are highly desired for the next generation of wearable electronic devices. However, manufacturing of such pressure sensors still remains challenging. A large‐area compliant and cost‐effective process to fabricate high‐performance pressure sensors via a combination of mesh‐molded periodic microstructures and printed side‐by‐side electrodes is presented. The sensors exhibit low operating voltage (1 V), high sensitivity (20.9 kPa−1), low detection limit (7.4 Pa), fast response/recovery time (23/18 ms), and excellent reliability (over 10 000 cycles). More importantly, they exhibit ultra‐broad working range (7.4–1 000 000 Pa), high tunability, large‐scale production feasibility, and significant advantage in format miniaturization and creating sensor arrays with self‐defined patterns. The versatility of these devices is demonstrated in various human activity monitoring and spatial pressure mapping as electronic skins. Furthermore, utilizing printing methods, a flexible smart insole with a high level of integration for both foot pressure and temperature mapping is demonstrated. The scalable and cost‐effective manufacturing along with the good comprehensive performance of the pressure sensors makes them very attractive for future development of wearable smart devices and human–machine interfaces.

Flexible Waterproof Piezoresistive Pressure Sensors with Wide Linear Working Range Based on Conductive Fabrics

“…Note that the most significant merit of our sensor is the rational combination of the extended working range and superior high sensitivity, which is higher than other reports with similar sensing materials (Fig. 3d) [28][29][30][31][32][33][34][35][36][37]. Furthermore, fast response time is imperative for the sensor to process the input data.…”

A Single‐Mode, Self‐Adapting, and Self‐Powered Mechanoreceptor Based on a Potentiometric–Triboelectric Hybridized Sensing Mechanism for Resolving Complex Stimuli

“…The PDMS friction layer (≈350 µm in thickness) with a similar microstructure was also prepared based on a mesh‐molding strategy (Figure S5, Supporting Information). [ 34 ]…”

Recent Progress in Flexible Pressure Sensors Based Electronic Skin

“…Flexible pressure sensors based on capacitive can convert mechanical stimuli into capacitive changes, as Reproduced with permission. [84] Copyright 2020, Wiley-VCH. b) Interlocking fabric.…”

“…Copyright 2020, Springer Nature. "Structure" Reproduced with permission [84]. Copyright 2020, Wiley-VCH.…”

“…Structures of piezoresistive-based flexible pressure sensors. a) Mesh-molded pressure sensing microcrostructure.Reproduced with permission [84]. Copyright 2020, Wiley-VCH.…”