Large-area profile measurement of sinusoidal freeform surfaces using a new prototype scanning tunneling microscopy

Chen, Yuan Liu; Zhu, Wu-Le; Yang, Shunyao; Ju, Bing Feng; Ge, Yue

doi:10.1016/j.precisioneng.2013.12.008

Cited by 10 publications

(11 citation statements)

References 24 publications

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“…Only three studies showing three-dimensional sinusoidal surfaces having comparable microscale motifs were identified in the literature: the corresponding characteristics of the surfaces are listed in Table 7. First, it should be noted that the period/amplitude ratios were either equal to 10 or 33 for the surfaces presented in this paper while this ratio is between 25 and 750 for [7] and is equal to 25 and 1000 for [23] and [24], respectively. Chen et al [7] compared the characteristics of the surface given by the manufacturer to the measurements made with scanning tunneling microscope.…”

Section: Discussionmentioning

confidence: 85%

“…First, it should be noted that the period/amplitude ratios were either equal to 10 or 33 for the surfaces presented in this paper while this ratio is between 25 and 750 for [7] and is equal to 25 and 1000 for [23] and [24], respectively. Chen et al [7] compared the characteristics of the surface given by the manufacturer to the measurements made with scanning tunneling microscope. Deviations were found to be small for amplitude and period.…”

Section: Discussionmentioning

confidence: 85%

“…They obtained local topographies having sinusoidal shapes. These few examples highlight the interest in sinusoidal surfaces in different fields: biology (cell migration [1,9,10], tactile perception [2]), mechanics (wettability [3,6], metrology [7,11], adhesion [12]). Numerous numerical studies are also based on the examination of sinusoidal surfaces.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Topography characterization of sinusoidal surfaces obtained with electrochemical machining

Marteau¹,

Anselme²,

Pieuchot³

et al. 2021

Surf. Topogr.: Metrol. Prop.

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The study and understanding of functionality and its link with surface topography requires surfaces that enable us to decouple the examined effect. The sinusoidal function offers an easy solution for the decoupling of amplitude and frequency. However, the corresponding surfaces would require very good characteristics: shape regularity, low waviness and low microroughness. This study thoroughly characterized sinusoidal surface (egg-box shapes) having periods ranging from 30 µm to 300 µm and peak-to-valley amplitudes comprised between 3 and 30 µm. The microroughness of the examined surfaces was quantified with the arithmetic mean deviation Sa and was found to be around 1 nm for most examined surfaces. The waviness of the surfaces, which was also quantified with Sa, was lower than 0.15 µm for all the surfaces. The relative error computed for the period of the sinusoidal surfaces was lower than 1.3%. Finally, the shape regularity was assessed by comparing the measurements to a mathematical function and the computed average residues were smaller than 0.8 µm. These characteristics highlighted the very good noise-to-signal ratio of the produced surfaces, which can be used in very different fields (biology, mechanics, optics…) to examine topography effect on functionality (cell adhesion, brightness…).

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Section: Discussionmentioning

confidence: 85%

Section: Discussionmentioning

confidence: 85%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Topography characterization of sinusoidal surfaces obtained with electrochemical machining

Marteau¹,

Anselme²,

Pieuchot³

et al. 2021

Surf. Topogr.: Metrol. Prop.

View full text Add to dashboard Cite

show abstract

“…Fang et al, Claverley and Leach, and Pawlus and Śmieszek studied methods to reduce dynamic errors, which are larger on steeper surfaces [6,29,30]. Fang et al, Chen et al, and Ju et al proposed the sample tilting method for profile measurement of microstructured surfaces using a stylus-based profiler [7,31,32]. Schuler et al and Beutler also proposed a profile measurement method by tilting the sensor heads [14,15].…”

Section: Introductionmentioning

confidence: 99%

Surface Profile Measurement and Error Compensation of Triangular Microstructures Employing a Stylus Scanning System

Yin

et al. 2018

Journal of Nanomaterials

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Microstructure-based function components are widely used in precision engineering. Surface profile measurement is an essential tool to verify the manufacturing quality of microstructures and to enhance the working performance of the device employing microstructures as function components. However, highly accurate surface profile measurements are difficult to perform for microstructures owing to their complex surface topographies. In this paper, a measurement system is proposed for the surface profile measurement of microstructures. The main components of the measurement system are a precision displacement stage to move the workpiece, a homemade probing system with a diamond microstylus to sense the surface profile variation of the microstructures on the workpiece, and a vibration isolation table to reduce the disturbance of the measurement environment. In addition, the stability of the measurement was experimentally investigated. Microstructures with shape of equilateral right triangle were employed as the measurement specimen, and the surface profile of triangular microstructures was measured by employing two methods to correct errors caused by the specimen inclination and the radius of the stylus tip. The shape, depth, and period of the measured microstructures were also detected based on the results of the surface profile measurement. Experimental results demonstrate the feasibility of the proposed surface profile measurement for microstructures with complex surface topographies.

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“…Previously, we had developed the etching process to fabricate ultrasharp probes with high aspect ratio 450:1 that is rather difficult to reach for the cantilever probe in the atomic force microscope [26], and achieved the off-line observation of highly oriented pyrolytic graphite (HOPG) as well as diamond machined sinusoidal freeform surfaces [27,28]. In this work, with the motivation of improving fabricated surface accuracy and reducing scrap rates, a new onmachine measuring system based on STM was developed on the diamond turning machine to apply in the fly cutting process for on-machine surface form characterization and assist the precision fabrication of rectangular pyramid array with slope angle of 45 • and height of 15 m. Fig.…”

Section: Introductionmentioning

confidence: 99%

Scanning tunneling microscopy-based on-machine measurement for diamond fly cutting of micro-structured surfaces

Zhu

Yang

et al. 2016

Precision Engineering

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Large-area profile measurement of sinusoidal freeform surfaces using a new prototype scanning tunneling microscopy

Cited by 10 publications

References 24 publications

Topography characterization of sinusoidal surfaces obtained with electrochemical machining

Topography characterization of sinusoidal surfaces obtained with electrochemical machining

Surface Profile Measurement and Error Compensation of Triangular Microstructures Employing a Stylus Scanning System

Scanning tunneling microscopy-based on-machine measurement for diamond fly cutting of micro-structured surfaces

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