Large-Area Quantitative Phase Mapping in the Scanning Electron Microscope

Abstract

Silicon-drift-based energy-dispersive X-ray spectrometers and spectral imaging data storage have expanded the possibilities for collecting high information-content X-ray data in a modern scanning electron microscope. The implementation of principal component analysis for phase determination combined with an automated stage and the capability to stitch together a series of sequentially collected images enables the collection and analysis of large-area quantitative phase maps for detailed materials characterization on practical time scales. The new approach provides significant improvements, particularly in speed and completeness of analysis. Examples show detailed quantitative analyses of a mineralogical sample and a complex ceramic composite.