2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2008
DOI: 10.1109/dtip.2008.4753009
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Large area roller embossing of multilayered ceramic green composites

Abstract: -This paper presents our latest achievements in developing large area patterning of multilayered ceramic green composites using micro roller embossing. The aim of this research is to develop large area pattern technique for ceramic green substrates using a modified roller laminator, which is compatible with screen printing apparatus, for integration of micro embossing and printing in the future stage. A thin film nickel mold was developed via photolithography, nickel electroplating and photoresist strip-off. T… Show more

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Cited by 5 publications
(5 citation statements)
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“…Embossing speed from 0.2 to 20 m min −1 was used to demonstrate a high volume process. The best replication was achieved at the speed of 0.2 m min −1 using a pressure of 8 MPa and a temperature of 105 • C. In order to optimize the R2R hot embossing, process parameters such as roller temperature, applied load and roller speed have been explored in detail [118,119] and the selected results are presented in figure 13. A sustainable throughput of 3 m min −1 was achieved with accurate transcript of the dot shape of 10 μm by the load of 3 kN.…”
Section: Process Study Of R2r Hot Embossingmentioning
confidence: 99%
“…Embossing speed from 0.2 to 20 m min −1 was used to demonstrate a high volume process. The best replication was achieved at the speed of 0.2 m min −1 using a pressure of 8 MPa and a temperature of 105 • C. In order to optimize the R2R hot embossing, process parameters such as roller temperature, applied load and roller speed have been explored in detail [118,119] and the selected results are presented in figure 13. A sustainable throughput of 3 m min −1 was achieved with accurate transcript of the dot shape of 10 μm by the load of 3 kN.…”
Section: Process Study Of R2r Hot Embossingmentioning
confidence: 99%
“…Processing parameters, e.g. the embossing temperature, the applied force, the feeding speed etc, greatly influence the formability of micro features [31,32]. Makela et al [33] structured submicron-scale gratings on 95 μm thick cellulose In the present study, an R2R hot embossing system has been developed in-house and the R2R hot embossing process for large-area polymeric film with micro-pyramids has been systematically investigated.…”
Section: Introductionmentioning
confidence: 99%
“…Among these main factors for R2R hot embossing, the roller speed is also related to the time duration effects of heat transfer. A slower roller speed properly secures a longer contact time between mold and polymer, improving embossing results (Ng & Wang, 2008; Shan et al, 2008). However, the substrate’s reverse side against the pressure roll might be better left untreated instead of being preheated because it needs to be more solid to provide proper support for the greater polymer deformation.…”
Section: Discussionmentioning
confidence: 99%