Large-Area Subwavelength Aperture Arrays Fabricated Using Nanoimprint Lithography

Skinner, Jack L.; Hunter, Luke; Talin, A. Alec; Provine, J.; Horsley, David A.

doi:10.1109/tnano.2008.2002648

Cited by 31 publications

(28 citation statements)

References 24 publications

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“…The quality factor (resonant wavelength/line width) of the system was 152 (473 nm/3.1 nm). The obtained FOM is higher than that of the previously reported FOM in nanostructure-based aluminum sensors1516174142, the FOM value (108) of the gold mushroom arrays11 and the theoretically estimated upper limits (FOM = 108) of the ATR-coupling SPR sensors43. We also tested the bulk sensitivity of capped nanoslits with different ridge height (H = 35) as shown in Fig.…”

Section: Resultsmentioning

confidence: 73%

Highly Sensitive Aluminum-Based Biosensors using Tailorable Fano Resonances in Capped Nanostructures

Lee

Hsu

You

et al. 2017

Sci Rep

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Metallic nanostructure-based surface plasmon sensors are capable of real-time, label-free, and multiplexed detections for chemical and biomedical applications. Recently, the studies of aluminum-based biosensors have attracted a large attention because aluminum is a more cost-effective metal and relatively stable. However, the intrinsic properties of aluminum, having a large imaginary part of the dielectric function and a longer evanescent length, limit its sensing capability. Here we show that capped aluminum nanoslits fabricated on plastic films using hot embossing lithography can provide tailorable Fano resonances. Changing height of nanostructures and deposited metal film thickness modulated the transmission spectrum, which varied from Wood’s anomaly-dominant resonance, asymmetric Fano profile to surface plasmon-dominant resonance. For biolayer detections, the maximum surface sensitivity occurred at the dip of asymmetric Fano profile. The optimal Fano factor was close to −1.3. The wavelength and intensity sensitivities for surface thickness were up to 2.58 nm/nm and 90%/nm, respectively. The limit of detection (LOD) of thickness reached 0.018 nm. We attributed the enhanced surface sensitivity for capped aluminum nanoslits to a reduced evanescent length and sharp slope of the asymmetric Fano profile. The protein-protein interaction experiments verified the high sensitivity of capped nanostructures. The LOD was down to 236 fg/mL.

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Section: Resultsmentioning

confidence: 73%

Highly Sensitive Aluminum-Based Biosensors using Tailorable Fano Resonances in Capped Nanostructures

Lee

Hsu

You

et al. 2017

Sci Rep

View full text Add to dashboard Cite

show abstract

“…The structure was fabricated in a pre-deposited three-layer MDM stack. J. L. Skinner et al in [70] explored the possibility of plasmonic biosensing using silver and aluminum nanohole arrays. Both arrays, with periodicity of 500 nm and nanohole diameters of 110 nm, were fabricated through NIL.…”

Section: Fabricationmentioning

confidence: 99%

Patterned Plasmonic Surfaces—Theory, Fabrication, and Applications in Biosensing

Chorsi

Zhu

Zhang

2017

J. Microelectromech. Syst.

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Low-profile patterned plasmonic surfaces are synergized with a broad class of silicon microstructures to greatly enhance near-field nanoscale imaging, sensing, and energy harvesting coupled with far-field free-space detection. This concept has a clear impact on several key areas of interest for the MEMS community, including but not limited to ultra-compact microsystems for sensitive detection of small number of target molecules, and “surface” devices for optical data storage, micro-imaging and displaying. In this paper, we review the current state-of-the-art in plasmonic theory as well as derive design guidance for plasmonic integration with microsystems, fabrication techniques, and selected applications in biosensing, including refractive-index based label-free biosensing, plasmonic integrated lab-on-chip systems, plasmonic near-field scanning optical microscopy and plasmonics on-chip systems for cellular imaging. This paradigm enables low-profile conformal surfaces on microdevices, rather than bulk material or coatings, which provide clear advantages for physical, chemical and biological-related sensing, imaging, and light harvesting, in addition to easier realization, enhanced flexibility, and tunability.

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“…The silicon master used in this study contained a large array (0.5 cm x 1 cm) of nanopillars (150 nm in diameter) created by interference lithography, which was described previously [22]. The template was first passivated by molecular vapor coating (MVC) with Nanonex Ultra-100.…”

Section: Passivation Of the Master Silicon Templatementioning

confidence: 99%

Fabrication of large arrays of plasmonic nanostructures via double casting

Horsley

Skinner

2012

Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V

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Large arrays of periodic nanostructures are widely used for plasmonic applications, including ultrasensitive particle sensing, optical nanoantennas, and optical computing; however, current fabrication processes (e.g., e-beam lithography and nanoimprint lithography) remain time consuming and expensive. Previously, researchers have utilized double casting methods to effectively fabricate large-scale arrays of microscale features. Despite significant progress, employing such techniques at the nanoscale has remained a challenge due to cracking and incomplete transfer of the nanofeatures. To overcome these issues, here we present a double casting methodology for fabricating large-scale arrays of nanostructures. We demonstrate this technique by creating large (0.5 cm x 1 cm) arrays of 150 nm nanoholes and 150 nm nanopillars from one silicon master template with nanopillars. To preclude cracking and incomplete transfer problems, a hard-PDMS/soft-PDMS (h-PDMS/s-PDMS) composite stamp was used to replicate the features from: (i) the silicon template, and (ii) the resulting PDMS template. Our double casting technique can be employed repeatedly to create positive and negative copies of the original silicon template as desired. By drastically reducing the cost, time, and labor associated with creating separate silicon templates for large arrays of different nanostructures, this methodology will enable rapid prototyping for diverse applications in nanotechnological fields.

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Large-Area Subwavelength Aperture Arrays Fabricated Using Nanoimprint Lithography

Cited by 31 publications

References 24 publications

Highly Sensitive Aluminum-Based Biosensors using Tailorable Fano Resonances in Capped Nanostructures

Highly Sensitive Aluminum-Based Biosensors using Tailorable Fano Resonances in Capped Nanostructures

Patterned Plasmonic Surfaces—Theory, Fabrication, and Applications in Biosensing

Fabrication of large arrays of plasmonic nanostructures via double casting

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