Large area transmissive modulator for a remotely interrogated MEMS-based optical tag

McNie, Mark E.; Scott, Andrew M.; Price, Nicola; Combes, David J.; Smith, Graeme C.; Ridley, Kevin D.; Brunson, K.M.; Jones, David C.; Lewis, Keith L.

doi:10.1117/12.809199

Cited by 3 publications

(3 citation statements)

References 4 publications

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“…It has been demonstrated in both the near-IR (1 -2.4 μm) [15][16] and mid-IR (3 -5 μm) bands at modulation speeds up to 500 kHz. With appropriate design the technology could also be utilised at long-IR wavelengths (8 -14 μm).…”

Section: Wider Applicability Of Transmissive Moems Microshuttersmentioning

confidence: 99%

A 2x2 multi-chip reconfigurable MOEMS mask: a stepping stone to large format microshutter arrays for coded aperture applications

et al. 2010

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Coded aperture imaging has been used for astronomical applications for several years. Typical implementations used a fixed mask pattern and are designed to operate in the X-Ray or gamma ray bands. Recently applications have emerged in the visible and infra red bands for low cost lens-less imaging systems and system studies have shown that considerable advantages in image resolution may accrue from the use of multiple different images of the same scene -requiring a reconfigurable mask.Previously reported work focused on realising a 2x2cm single chip mask in the mid-IR based on polysilicon micro-optoelectro-mechanical systems (MOEMS) technology and its integration with ASIC drive electronics using conventional wire bonding. It employs interference effects to modulate incident light -achieved by tuning a large array of asymmetric Fabry-Perot optical cavities via an applied voltage and uses a hysteretic row/column scheme for addressing.In this paper we report on the latest results in the mid-IR for the single chip reconfigurable MOEMS mask, trials in scaling up to a mask based on a 2x2 multi-chip array and report on progress towards realising a large format mask comprising 44 MOEMS chips. We also explore the potential of such large, transmissive IR spatial light modulator arrays for other applications and in the current and alternative architectures.

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Section: Wider Applicability Of Transmissive Moems Microshuttersmentioning

confidence: 99%

A 2x2 multi-chip reconfigurable MOEMS mask: a stepping stone to large format microshutter arrays for coded aperture applications

et al. 2010

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“…In combination with a high index retroreflector (e.g. silicon), this offers a ±60 degree field of view [4]. This reduces the associated cost of the modulator element by using standard materials and silicon processing, and provides a route to large area modulators.…”

Section: Introductionmentioning

confidence: 99%

Retro-reflective communications over a kilometre range using a MEMS-based optical tag

et al. 2009

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We report on a laser communications experiment over a kilometre optical range where we have used a retro-reflective transponder incorporating an optical modulator based on silicon micro-electro-mechanical systems (MEMS) device. This employs interference to provide modulation and relies on performing as a coherent array to modulate incident light in the near-IR band (1550nm) over a wide angular range (120 degrees). Modulation is achieved by tuning a large array of Fabry-Perot cavities via the application of an electrostatic force to adjust the gap between a moveable mirror and the underlying silicon substrate.The micro-mirrors have a strong mechanical resonance, and modulate light by adjusting the spacing between the micromirrors and the substrate. We use a 'release and catch' technique to exploit the mechanical resonance, and we time the motion of the micro-mirrors to be synchronised with the arrival of an interrogator pulse to ensure that the etalon spacing provides the required modulation, whatever the angle of incidence.We describe experiments over a one kilometre path where simple strings were sent at 200kbit per second. We also discuss approaches to adapting the link to a given angle of incidence.

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“…Potential MOEMS transmissive microshutter technologies include thermally or electrostatically actuated curling shutters [11][12], magnetically actuated shutter arrays and our preferred technology: electrostatically actuated interference-based shutters [13][14].…”

Section: Introductionmentioning

confidence: 99%

Establishing a MOEMS process to realise microshutters for coded aperture imaging applications

et al. 2011

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Coded aperture imaging has been used for astronomical applications for several years. Typical implementations used a fixed mask pattern and are designed to operate in the X-Ray or gamma ray bands. Recently applications have emerged in the visible and infra red bands for low cost lens-less imaging systems and system studies have shown that considerable advantages in image resolution may accrue from the use of multiple different images of the same scene -requiring a reconfigurable mask. Previously reported work focused on realising such a mask to operate in the mid-IR band based on polysilicon micro-optoelectro-mechanical systems (MOEMS) technology and its integration with ASIC drive electronics using a tiled approach to scale to large format masks. The MOEMS chips employ interference effects to modulate incident light -achieved by tuning a large array of asymmetric Fabry-Perot optical cavities via an applied voltage using row/column addressing.In this paper we report on establishing the manufacturing process for such MOEMS microshutter chips in a commercial MEMS foundry, MEMSCAP -including the associated challenges in moving the technology out of the development laboratory into manufacturing. Small scale (7.3 x 7.3mm) and full size (22 x 22mm) MOEMS chips have been produced that are equivalent to those produced at QinetiQ. Optical and electrical testing has shown that these are suitable for integration into large format reconfigurable masks for coded aperture imaging applications.

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Large area transmissive modulator for a remotely interrogated MEMS-based optical tag

Cited by 3 publications

References 4 publications

A 2x2 multi-chip reconfigurable MOEMS mask: a stepping stone to large format microshutter arrays for coded aperture applications

A 2x2 multi-chip reconfigurable MOEMS mask: a stepping stone to large format microshutter arrays for coded aperture applications

Retro-reflective communications over a kilometre range using a MEMS-based optical tag

Establishing a MOEMS process to realise microshutters for coded aperture imaging applications

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