We report the fabrication of InGaN/GaN multi quantum well (MQW) microdisk arrays on Si(111) substrates. InGaN/GaN MQWs were grown on highly tensile‐strained GaN films on Si(111) substrate by metalorganic chemical vapor deposition. Microdisk resonators were fabricated using a combination of optical lithography, a dry GaN‐etching process, and Si undercut etching by acid chemical solution. The evidence of whispering‐gallery modes in optically pumped microdisk cavities have been observed by photoluminescence. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)