Large displacement bi-directional out-of-plane Lorentz actuator array for surface manipulation

Park, Byoungyoul; Afsharipour, Elnaz; Chrusch, D.D.; Shafai, Cyrus; Andersen, David R.; Burley, Greg

doi:10.1088/1361-6439/aa7970

Cited by 13 publications

(5 citation statements)

References 25 publications

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“…The limitation comes from the fact that the actuation voltage is proportional to the square of the distance between the electrode and the mirror plates, which significantly limits the stroke. MEMS Lorentz forcecontrolled DMs 6,7 (also called low-voltage DMs (LVDMs)) have many advantages over electrostatic DMs, such as low-voltage operation, bi-directional motion without magnetic hysteresis, and the ability to push and pull objects out of plane 7 . MEMS LVDM have a simple actuator design, quick response time, and low power consumption, making them ideal for a variety of applications.…”

Section: Introductionmentioning

confidence: 99%

Multistage anisotropic wet etching by KOH for MEMS/NEMS structures

Rahman,

Bergren,

Burley

et al. 2024

Novel Patterning Technologies 2024

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Adaptive Optics (AO) systems add value in applications that involve light collection through turbulent media. Examples include Earth-based telescopes, microscopy, optical communication, and high-energy lasers, where solutions for addressing distorted images are needed. A key challenge in building AO systems involves achieving sufficient correction of distorted images through optical elements that can change shape with enough vertical displacement, spatial resolution, and frequency to adequately correct images. One such AO element is a deformable mirror that is bonded to an array of MEMs-based actuators that is made to operate using the Lorentz force. These elements can operate with very low power and are known as Low-Voltage Deformable Mirrors (LVDM). This study delves into a multi-step Potassium Hydroxide (KOH) etching process, encompassing surface preparation, mask deposition, lithography, and etching. KOH bulk micromachining proves critical in precision crafting of detailed 3D microstructures through anisotropic wet etching, offering unparalleled control over structural depth and morphology. LVDM Lorentz actuators are systematically arrayed in 20 × 20 geometries, interconnected with a flexible, reflective membrane mirror.Fabrication of the actuator arrays using Silicon on Insulator (SOI) wafers utilizes a multi-step KOH bulk process, with a design that integrates a crossbar, pillar, and springs, with a need for a crucial depth of up to 35 μm. This study provides a detailed account of the two-step KOH etching process, emphasizing critical parameters for successful Lorentz actuator fabrication on SOI wafers. Exploration of process variables like temperature, etchant concentration, and etching time is undertaken, considering their impact on etch rate and selectivity. Understanding these variables proves vital for achieving high-quality and reproducible MEMS structures in micro-/nanofabrication. The study also tackles challenges associated with multistage anisotropic wet etching, including etch pit formation, crystallographic defects, and surface roughness. Strategies to mitigate these challenges, such as surfactant use, additives, and post-etch treatments, are discussed, emphasizing their effectiveness in improving final device performance and reliability.

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Section: Introductionmentioning

confidence: 99%

Multistage anisotropic wet etching by KOH for MEMS/NEMS structures

Rahman,

Bergren,

Burley

et al. 2024

Novel Patterning Technologies 2024

View full text Add to dashboard Cite

show abstract

“…Other techniques involved the use of dynamic surface manipulation based on surface actuator array that deterministically pushes objects on or off a surface. For example, Park et al (2017) introduced a large displacement out-of-plane Lorentz microelectromechanical (MEMS) actuator array for surface manipulation. The applications of the stick–slip mechanism were also applied on the transportation of untethered vehicles, such as centimeters size vibration-driven robots and micrometer size robots on a MEMS surface (Breguet and Clavel, 1998; Donald et al, 2008; Notomista et al, 2019; Vartholomeos and Papadopoulos, 2006).…”

Section: Introductionmentioning

confidence: 99%

Modeling and analysis of vibratory feeder system based on robust stick–slip motion

Mayyas

2021

Journal of Vibration and Control

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This study presents model and analysis of a robust one-dimensional stick–slip transportation of an object, on dry contact with an oscillating platform suspended by nonlinear leaf spring. The oscillating platform is designed and modeled such that the elastic spring constant is direction dependent. A recursive analytical solution algorithm is proposed to solve nonlinear system dynamics. The system and the input force parameters are both investigated with goal to optimize the average velocity of the object. Both experimental and analytical results showed that the stick–slip motion is highly nonlinear and sensitive to the system and input force parameters. Moreover, the simulations showed that it is feasible to design a platform with robust sets of parameters (natural frequencies) and further use the input force parameters (amplitude and driving frequency) to tune for desired average velocity, under given dry friction conditions.

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“…These schemes can be broadly classified into three different groups based on the force generating structures located on the actuator side. These are (1) moving magnet (hard magnetic) actuation [15][16][17], (2) moving coil (Lorentz force) actuation [18,19] and (3) soft magnetic actuation [20][21][22] schemes. Since the preferred bulk fabrication material SS430 is a ferritic soft magnetic material, the soft magnetic actuation scheme inherently becomes the governing actuation mechanism in this work.…”

Section: Introductionmentioning

confidence: 99%

Field-of-view optimization of magnetically actuated 2D gimballed scanners

Aköz¹,

Gökdel²

2020

Turk J Elec Eng & Comp Sci

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This work presents the field of view (FOV) maximization of a magnetically actuated two-dimensional (2D) gimballed scanner. The process of maximization is completed in two steps. (1) Optimization of the electrocoil providing the magnetic force that moves the scanner and (2) precise choice of optimum respective locations of both the scanner and the electrocoil. We first derived a formula relating the generated magnetic flux density, coil design parameters and driving voltage. Subsequently, we discussed the design trade-offs of an actuating electrocoil. We also conducted several experiments on a stainless steel 430 scanner having a footprint of 15 mm × 15 mm and a thickness of 460 µm. We determined the precise locations for the system components producing the maximum total optical scan angle (TOSA) hence the largest FOV. Finally, we proposed an empirically demonstrated formula, p(x1, y1) ≈ p(0.25Ls + 0.25Lm) , for the optimum electrocoil location with respect to the scanner by providing an offset ∆ x and ∆ y from the center to be able to successfully maximize the displacement and the related total optical scan angle of the system.

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Large displacement bi-directional out-of-plane Lorentz actuator array for surface manipulation

Cited by 13 publications

References 25 publications

Multistage anisotropic wet etching by KOH for MEMS/NEMS structures

Multistage anisotropic wet etching by KOH for MEMS/NEMS structures

Modeling and analysis of vibratory feeder system based on robust stick–slip motion

Field-of-view optimization of magnetically actuated 2D gimballed scanners

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