has attracted much attention of researchers, and large lateral shift has been realized in different structures for its potential applications in integrated optics, optical storage, and optical sensors, such as a Krestschmann configuration with longrange surface plasmon resonance and a prism-waveguide system with gold layer. Wang et al. [3] investigated the tunable lateral shifts in a Kretschmann configuration with an electro-optic crystal prism based on the surface plasmon resonance and Pockels effect. In a prism-waveguide system with gold layer, the positive and negative lateral shifts were studied, and the enhancement of GH effect can be widely used in the detection of surface irregularities and roughness because of its great improvement of sensitivity [4]. In 2013, Wang proposed a high-sensitivity temperature sensor based on the enhanced GH effect in a symmetrical metal-cladding waveguide [5]. The temperature change induces the GH shift change which can be detected by the position-sensitive detector (PSD). The sensor exhibits a good linearity and a high resolution of approximately 5 × 10 −3 °C.Silicon-on-insulator (SOI) waveguide structures are very promising in the application areas, such as optical interconnects in high-speed microprocessors and on-chip control circuits with optoelectronics for wavelength division multiplexing. They are characterized by small optical losses over communication wavelengths and fully compatible with CMOS technology and micromechanical devices [6,7]. Silicon is available in large size, good quality, and low price, and its technology is highly developed. A typical SOI waveguide has a silicon core and a silica cladding. As silicon's thermo-optic effect [8] is significantly larger than its electro-optic effect [9], it is an attractive method to modulate the refractive index in SOI waveguides. As devices and components based on thermo-optic (TO) effect show low transmission loss, low cost, high stability, low power consumption, and very large scale of integration, the TO effect Abstract We study the thermo-optic Goos-Hänchen (TOGH) effect in a prism-waveguide coupling structure with silicon-on-insulator waveguide. Stationary-phase method is utilized to calculate the TOGH shift. When the waveguide is regarded as a two-dimensional planar waveguide, a nonlinear relation between GH shift and temperature is obtained. Based on the noticeable TOGH effect, a sensitive temperature modulator or sensor can be realized. As the waveguide width is limited, the proposed structure can be regarded as a three-dimensional rectangular waveguide. We explore the GH shift and TOGH effect for different modes propagating in rectangular waveguide which show different linear relations between GH shift and temperature, which can be used to design mode-selective device based on TO effect.