2016
DOI: 10.1016/j.diamond.2016.01.016
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Large radius of curvature micro-lenses on single crystal diamond for application in monolithic diamond Raman lasers

Abstract: The design and fabrication of large radii of curvature micro-lenses in single crystal chemical vapour deposition diamond is described. An optimised photoresist reflow process and low selectivity inductively coupled plasma etching are used to actualize a uniform array of micro-lenses with radii of curvature of 13 mm or more and a high quality surface of a root-mean-square roughness of 0.18 nm. The processes developed have the potential to achieve diamond micro-lenses with an even larger radius of curvature. The… Show more

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Cited by 26 publications
(12 citation statements)
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“…13,14 The technique of diamond microlens fabrication with a special geometry might also find use in solid-immersion-lenses for quantum related technologies. 10,29,30 Similarly, microlenses with different diameters and ROCs on various materials can be achieved following the principles outlined here on demand and might find their application in imaging 31 or displays.…”
Section: Discussionmentioning
confidence: 99%
See 1 more Smart Citation
“…13,14 The technique of diamond microlens fabrication with a special geometry might also find use in solid-immersion-lenses for quantum related technologies. 10,29,30 Similarly, microlenses with different diameters and ROCs on various materials can be achieved following the principles outlined here on demand and might find their application in imaging 31 or displays.…”
Section: Discussionmentioning
confidence: 99%
“…10,11 Especially, a diamond microlens with a large radius of curvature (ROC) is desired in semiconductor disk lasers and diamond Raman lasers to provide mode matching or reduce the risk of mirror coating damage. [12][13][14] Up until now, microlenses are typically fabricated by thermal reflow of a single PR layer 15 and subsequent pattern transfer by inductively coupled plasma (ICP) etching. This approach is attractive due to its simplicity, high reproducibility, and the high surface quality of the resulting microlenses.…”
Section: Introductionmentioning
confidence: 99%
“…The advent of HPHT and CVD technologies, with the possibility of synthesizing diamonds at reasonable costs, have fostered the use of diamond based technologies with outcomes in a variety of ordinary commercial products. Diamond lenses for optical applications for high-power high-energy radiations or harsh envorinments is an example [275,276]. Diamond with its outstanding thermal conductivity coupled with the high isolating power [277] makes it desirable in high power electrical devices [278,279].…”
Section: Nanodiamonds and Diamond Filmsmentioning
confidence: 99%
“…An array of micro-lenses was etched on the diamond surface to create a micro-lensed device (see Fig. 1), using a technique described in detail in [19]. The micro-lenses have parameters similar to the ones reported in [16].…”
Section: A 1 St Stokes Emission Energy Scalingmentioning
confidence: 99%