2015
DOI: 10.1021/acs.nanolett.5b01335
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Large-Scale Arrays of Bowtie Nanoaperture Antennas for Nanoscale Dynamics in Living Cell Membranes

Abstract: We present a novel blurring-free stencil lithography patterning technique for high-throughput fabrication of large-scale arrays of nanoaperture optical antennas. The approach relies on dry etching through nanostencils to achieve reproducible and uniform control of nanoantenna geometries at the nanoscale, over millimeter-sizes in a thin aluminum film. We demonstrate the fabrication of over 400 000 bowtie nanoaperture (BNA) antennas on biocompatible substrates, having gap sizes ranging from (80 ± 5) nm down to (… Show more

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Cited by 46 publications
(70 citation statements)
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“…[23][24][25][26] Moreover, when combined with FCS, single molecule detection at ultrahigh sample concentrations with microsecond time resolution can be obtained, both in solution and living cell membranes. [27][28][29][30][31] However, in most antenna designs the region of maximum field localization and enhancement (i.e., hotspot) is buried into the nanostructure, and thus difficult to access. Recently, we overcame this drawback by fabricating in-plane dimer antenna arrays where the gap region is located at the sample surface.…”
Section: Abstract: Optical Nano-antennas; Fluorescence Correlation Spmentioning
confidence: 99%
“…[23][24][25][26] Moreover, when combined with FCS, single molecule detection at ultrahigh sample concentrations with microsecond time resolution can be obtained, both in solution and living cell membranes. [27][28][29][30][31] However, in most antenna designs the region of maximum field localization and enhancement (i.e., hotspot) is buried into the nanostructure, and thus difficult to access. Recently, we overcame this drawback by fabricating in-plane dimer antenna arrays where the gap region is located at the sample surface.…”
Section: Abstract: Optical Nano-antennas; Fluorescence Correlation Spmentioning
confidence: 99%
“…Not only should nanogaps with sub 20 nm dimensions be reproducibly fabricated, but also the gap region (plasmonic hotspot) must remain accessible to probe the target molecules. Despite impressive recent progress using electron beam, 22 focused ion beam 23 or stencil lithographies, 24,25,26 or alternatively with bottom-up self-assembly techniques, 6,7,9,13,16,[27][28][29][30] the challenges of reliable narrow gap fabrication and hotspot accessibility remain major hurdles limiting the impact and performance of optical nanoantennas. For instance, when aiming for the fabrication of aperture antennas, electron beam lithography (EBL) using a positive-tone resist requires metal dry etching, which produces high line-edge roughness that are not suited for the definition of reliable and high aspect ratio nanogaps.…”
mentioning
confidence: 99%
“…As a result, the power throughput was improved ~3 orders of magnitude, the signal intensity of single molecule was enhanced ~6 folds [4]. With the bowtie nanoaperture probe, the optical confinement of 20~80 nm was obtained [8,9], which opened the possibility to image the molecules smaller than ~50 nm.…”
Section: Reviewmentioning
confidence: 99%