Narrowing of the discharge in wide-aperture transversely exited KrF excimer laser heads is shown as a result of the effect of t h e ground return at the outer boundary of the laser chamber on the electric field line distribution. It is shown theoretically and experimentally that it has a strong contribution to the electric field line distribution. while the electrode shape and separation are only of secondary importance. In order to avoid t h e narrowing effect, a compensated configuration is suggested 1.