Large-scale high-numerical-aperture super-oscillatory lens fabricated by direct laser writing lithography

Ni, Haibin; Yuan, Guanghui; Sun, Liangdong; Chang, Ning; Zhang, Di; Chen, Ruipeng; Jiang, Liyong; Chen, Hong‐Yuan; Gu, Zhongze; Zhao, Xiangwei

doi:10.1039/c8ra02644k

Cited by 25 publications

(20 citation statements)

References 26 publications

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“…One of them is an optimal combination of fabrication throughput and size of the final structures. There was always a drive behind making 3DLL structures as large as needed for functional applications without compromising on the achievable resolution [7,[19][20][21][22][23][24]. This is directly tied to how the material is exposed by the laser beam.…”

Section: Introductionmentioning

confidence: 99%

Mesoscale laser 3D printing

et al. 2019

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3D meso scale structures that can reach up to centimeters in overall size but retain micro-or nano-features, proved to be promising in various science fields ranging from micro-mechanical metamaterials to photonics and bio-medical scaffolds. In this work, we present synchronization of the linear and galvanometric scanners for efficient femtosecond 3D optical printing of objects at the meso-scale (from sub-µm to sub-cm spanning five orders of magnitude). In such configuration, the linear stages provide stitch-free structuring at nearly limitless (up to tens-of-cm) working area, while galvo-scanners allow achieving translation velocities in the range of mm/s-cm/s without sacrificing nano-scale positioning accuracy and preserving the undistorted shape of the final print. The principle behind this approach is demonstrated, proving its inherent advantages in comparison to separate use of only linear stages or scanners. The printing rate is calculated in terms of voxels/s, showcasing the capability to maintain an optimal feature size while increasing throughput. Full capabilities of this approach are demonstrated by fabricating structures that reach millimeters in size but still retain sub-µm features: scaffolds for cell growth, microlenses, and photonic crystals. All this is combined into a benchmark structure: a meso-butterfly. Provided results show that synchronization of two scan modes is crucial for the end goal of industrial-scale implementation of this technology and makes the laser printing well aligned with similar approaches in nanofabrication by electron and ion beams.

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Section: Introductionmentioning

confidence: 99%

Mesoscale laser 3D printing

et al. 2019

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“…The downside of this approach is the printing area being confined to a working field of an objective which is in the order of several hundred μm. If structure dimensions exceeded the working area of an objective (which is the case for most RMapplicable structures), it had to be divided into segments which were then printed one by one, resulting in stitching between segments [67][68][69][70]. Stitches induce optical and mechanical defects which might compromise functionality of the structure.…”

Section: Initiation Propagation Terminationmentioning

confidence: 99%

Polymers for Regenerative Medicine Structures Made via Multiphoton 3D Lithography

Merkininkaitė

Gailevičius

Šakirzanovas

et al. 2019

International Journal of Polymer Science

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Multiphoton 3D lithography is becoming a tool of choice in a wide variety of fields. Regenerative medicine is one of them. Its true 3D structuring capabilities beyond diffraction can be exploited to produce structures with diverse functionality. Furthermore, these objects can be produced from unique materials allowing expanded performance. Here, we review current trends in this research area. We pay particular attention to the interplay between the technology and materials used. Thus, we extensively discuss undergoing light-matter interactions and peculiarities of setups needed to induce it. Then, we continue with the most popular resins, photoinitiators, and general material functionalization, with emphasis on their potential usage in regenerative medicine. Furthermore, we provide extensive discussion of current advances in the field as well as prospects showing how the correct choice of the polymer can play a vital role in the structure’s functionality. Overall, this review highlights the interplay between the structure’s architecture and material choice when trying to achieve the maximum result in the field of regenerative medicine.

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“…Notably, parallel fabrication of optical elements is becoming the main trend instead of the complex and time-consuming processes such as electron beam lithography (EBL) and focused ion beam etching (FIB). 15,[26][27][28][29] Recently, direct laser writing (DLW) lithography was employed to fabricate a planar lens, 30,31 but several square regions were joined together to acquire a hundreds of micrometers device and an apparent misalignment could be found. Through pushing the smallest line width of the planar SOLs up to tens of micrometers, we just realized centimeter-scale SOLs by employing the normal lithography process at the wafer level.…”

Section: Introductionmentioning

confidence: 99%

Efficiency-enhanced and sidelobe-suppressed super-oscillatory lenses for sub-diffraction-limit fluorescence imaging with ultralong working distance

Yuan

et al. 2020

Nanoscale

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Large-scale high-numerical-aperture super-oscillatory lens fabricated by direct laser writing lithography

Abstract: Super-oscillatory lens achieving sub-Abbe–Rayleigh diffraction limit focusing in the optical far-field were produced by direct laser writing (DLW) lithography method.

Cited by 25 publications

References 26 publications

Mesoscale laser 3D printing

Mesoscale laser 3D printing

Polymers for Regenerative Medicine Structures Made via Multiphoton 3D Lithography

Efficiency-enhanced and sidelobe-suppressed super-oscillatory lenses for sub-diffraction-limit fluorescence imaging with ultralong working distance

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