Large-Stroke Capacitive MEMS Accelerometer Without Pull-In

Daeichin, Meysam; Miles, Ronald N.; Towfighian, Shahrzad

doi:10.1109/jsen.2020.3027270

Cited by 23 publications

(5 citation statements)

References 27 publications

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“…Motion sensors can be used to detect the motion of an object, generally including accelerometers [38]- [40] and IMUs 15) metacarpophalangeal (MCP) joint, ( 16) abduction angle of the MCP joints, and ( 17) interphalangeal (IP) joint [37] .…”

Section: A Motion Sensorsmentioning

confidence: 99%

Quantitative Upper Limb Impairment Assessment for Stroke Rehabilitation: A Review

Wang,

Zhang,

Xie

et al. 2024

IEEE Sensors J.

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With the number of people surviving a stroke soaring, automated upper limb impairment assessment has been extensively investigated in the past decades since it lays the foundation for personalised precision rehabilitation. The recent advancement of sensor systems, such as high-precision and real-time data transmission, have made it possible to quantify the kinematic and physiological parameters of stroke patients. In this paper, we review the development of sensor-based upper limb quantitative impairment assessment, concentrating on the capable of comprehensively and accurately detecting motion parameters and measuring physiological indicators to achieve the objective and rapid quantification of the stroke severity. The paper discusses various features used by different sensors, detectable actions, their utilization techniques, and effects of sensor placement on system accuracy and stability. In addition, both the advantages and disadvantages of the model-based and model-free algorithms are also reviewed. Furthermore, challenges encompassing comprehensive assessment of medical scales, neurological deficits assessment, random movement detection, the effect of the sensor placement, and the effect of the number of sensors are also discussed.

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Section: A Motion Sensorsmentioning

confidence: 99%

Quantitative Upper Limb Impairment Assessment for Stroke Rehabilitation: A Review

Wang,

Zhang,

Xie

et al. 2024

IEEE Sensors J.

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“…The design of the top layer is inspired by the design of a MEMS accelerometer where the movable electrode is suspended with serpentine springs. [ 5 ] The fabrication of the MEMS triboelectric generator used in this paper is described in ref. [28].…”

Section: Mechanism Description and Modelingmentioning

confidence: 99%

“…Capacitive sensing is featured in microphones, accelerometers, ultrasonic transducers, artificial skin, and in wearable devices. [4][5][6][7][8][9] In electromagnetic motion sensing, the voltage is produced from a conductor in motion within an electromagnetic field, which is correlated to the motion velocity. Sensing motion with piezoresistive materials benefits from the change in their nominal resistance.…”

Section: Introductionmentioning

confidence: 99%

High Signal‐to‐Noise Ratio Event‐Driven MEMS Motion Sensing

Mousavi,

Alzgool,

Davaji

et al. 2023

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Two solutions for improving MEMS triboelectric vibration sensors performance in contact‐separation mode are reported experimentally and analytically. Triboelectric sensors have mostly been studied in the mesoscale. The gap variation between the electrodes induces a potential difference that represents the external vibration. Miniaturizing the device limits the sensor output because of the limited gap. This work offers a warped MEMS diaphragm constrained on its edges. The dome‐shaped structure provides one order of magnitude larger displacement after contact‐separation than standard designs resulting in one order of magnitude greater voltage and signal‐to‐noise‐ratio. Second, micro triboelectric sensors do not operate unless the external vibration is sufficiently forceful to initiate contact between layers. The proposed constraints on the edge of the diaphragm provide friction during periodic motion and generate charges. The combination of the warped diaphragm and boundary constraints instead of serpentine springs increases the charge density and voltage generation. The mechanical properties and electrical output are thoroughly investigated including nonlinearity, sensitivity, and signal‐to‐noise ratio. A sensitivity of 250 mV g−1 and signal‐to‐noise‐ratio of 32 dB is provided by the presented device at resonance, which is very promising for event‐driven motion sensors because it does not require signal conditioning and therefore simplifies the sensing circuitry.

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“…However, nonlinear springs can have the problem of increasing the controlling voltage. Offset electrode designs [27][28][29][30] are another common reported method to improve the deflection range. The offset electrode configuration also reduces the pull-in instability.…”

Section: Introductionmentioning

confidence: 99%

Experimental analysis of a low controlling voltage tri-electrode MEMS electrostatic actuator for array applications

Allameh

Zhou²,

Chen³

et al. 2023

J. Micromech. Microeng.

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A tri-electeode electrostatic actuator with one moving MEMS electrode and two stationary electrodes (tri-electrode actuator topology) is experimentally tested in this article. The stationary controlling (intermediate) electrode is perforated and below the moving MEMS electrode, while the common electrode is further below. Numerical simulations were performed to discover the optimal design parameters for a tri-electrode electrostatic actuator in comparison to a conventional two electrode electrostatic actuator. A silicon-based moving MEMS electrode was designed with a relatively linear spring constant, and the controlling intermediate and primary stationary electrodes were fabricated on either side of a quartz substrate instead of free space to simplify their fabrication. The measurement results showed that the tri-electrode topology can control the displacement of the MEMS with a lower controlling voltage and with extended controllable range before pull-in instability, compared to the conventional actuator. Simulations and measurements showed that the controlling voltage was reduced by 2.6 times compared to the conventional actuator design employing a bipolar driven intermediate electrode, while the controllable deflection range before pull-in was elevated by 33%. This tri-electrode design offers benefits for applications in need of arrays of electrostatic actuators such as deformable mirrors.

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Large-Stroke Capacitive MEMS Accelerometer Without Pull-In

Cited by 23 publications

References 27 publications

Quantitative Upper Limb Impairment Assessment for Stroke Rehabilitation: A Review

Quantitative Upper Limb Impairment Assessment for Stroke Rehabilitation: A Review

High Signal‐to‐Noise Ratio Event‐Driven MEMS Motion Sensing

Experimental analysis of a low controlling voltage tri-electrode MEMS electrostatic actuator for array applications

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