2019
DOI: 10.1002/pi.5834
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Laser ablation of polymers: a review

Abstract: Laser ablation (LA), which employs a pulsed laser to remove materials from a substrate for generating micro-/nanostructures, has tremendous applications in the fabrication of metals, ceramics, glasses and polymers. It has become a noteworthy approach for achieving various functional structures in engineering, chemistry, biology, medicine and other fields. Polymers are one such class of materials; they can be melted and vaporized at high temperature during the ablation process. A number of polymers have been re… Show more

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Cited by 163 publications
(102 citation statements)
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“…In comparing these figures with Fig. (6, b), due to the data in Table (1) and the solution resulted in [15], good agreements with the experimental works in [9,10] take place.…”
Section: The Results and Discussionsupporting
confidence: 77%
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“…In comparing these figures with Fig. (6, b), due to the data in Table (1) and the solution resulted in [15], good agreements with the experimental works in [9,10] take place.…”
Section: The Results and Discussionsupporting
confidence: 77%
“…Following the basic rules in [13], we will verify in (10) the homogeneous balance between the highest order derivative terms with nonlinear terms to this system : the highest order derivative term namely v  gives f+4, while the highest non-linear term is…”
Section: The Homogeneous Balance Methodsmentioning
confidence: 99%
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“…Parylene‐C has been also shown to be amenable for fabricating shadow masks, but its fabrication process is complex and requires multiple time‐consuming steps including chemical vapor deposition, thermal evaporation, and reactive ion etching . Flexible membranes made of other polymeric materials such as polyimide (PI), polytetrafluoroethylene, poly(methyl methacrylate) mostly fabricated by laser micromachining have been investigated by many groups . However, severe polymer warping during laser cutting, low control over the feature size, and high cost of the process are critical issues.…”
mentioning
confidence: 99%