Laser applications in nanotechnology: nanofabrication using laser ablation and laser nanolithography

Макаров, Г. Н.

doi:10.3367/ufne.0183.201307a.0673

Cited by 83 publications

(26 citation statements)

References 460 publications

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“…It has been shown that, fixed the Ar pressure, at low laser pulses number, isolated nearly spherical nanoparticles are obtained, while at increasing laser pulses number clustered nanoparticles, islands and finally nearly percolated structures are observed on the samples surface. [24] The Ar pressure plays a similar role on the film morphologies at decreasing values, having fixed the laser pulse number.…”

Section: Introductionmentioning

confidence: 99%

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Metal Nanoparticles Deposited on Porous Silicon Templates as Novel Substrates for SERS

Mikac¹,

Ivanda²,

Gotić³

et al. 2015

Croat. Chem. Acta

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Abstract:In this paper, results on preparation of stable and uniform SERS solid substrates using macroporous silicon (pSi) with deposited silver and gold are presented. Macroporous silicon is produced by anodisation of p-type silicon in hydrofluoric acid. The as prepared pSi is then used as a template for Ag and Au depositions. The noble metals were deposited in three different ways: by immersion in silver nitrate solution, by drop-casting silver colloidal solution and by pulsed laser ablation (PLA). Substrates obtained by different deposition processes were evaluated for SERS efficiency using methylene blue (MB) and rhodamine 6G (R6G) at 514.5, 633 and 785 nm. Using 514.5 nm excitation and R6G the limits of detection (LOD) for macroporous Si samples with noble metal nanostructures obtained by immersion of pSi sample in silver nitrate solution and by applying silver colloidal solution to pSi template were 10 -9 M and 10 -8 M respectively. Using 633 nm laser and MB the most noticeable SERS activity gave pSi samples ablated with 30000 and 45000 laser pulses where the LODs of 10 -10 M were obtained. The detection limit of 10 -10 M was also reached for 4 mA cm -2 -15 min pSi sample, silver ablated with 30000 pulses. Macroporous silicon proved to be a good base for the preparation of SERS substrates.

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Section: Introductionmentioning

confidence: 99%

“…[22,23] The formation of silver and gold thin films on the porous Si can be obtained, also, by pulsed laser ablation (PLA). [24] In this method power laser pulses are used to evaporate material from the target surface which results in the formation of plasma plume. The ablated material is then collected on a substrate.…”

Section: Introductionmentioning

confidence: 99%

Metal Nanoparticles Deposited on Porous Silicon Templates as Novel Substrates for SERS

Mikac¹,

Ivanda²,

Gotić³

et al. 2015

Croat. Chem. Acta

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“…In principle, particles can be also heated by a rather weak laser energy absorption, or by the heat exchange with the surrounding liquid. These effects commonly lead to particle reshaping or even fragmentation (Antipov et al 2012;Makarov 2013). This process can become particularly important if liquid is heated up to a supercritical state (Abramov et al 2014).…”

Section: Nanoparticle Morphology and Optical Propertiesmentioning

confidence: 99%

Reliable and well-controlled synthesis of noble metal nanoparticles by continuous wave laser ablation in different liquids for deposition of thin films with variable optical properties

et al. 2016

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International audienceWe report the results of continuous wave laser interactions with both gold and silver targets in the presence of different liquids (deionized water, ethanol, and glycerol). Upon moderate laser irradiation at wavelength of 1.06 nm during 30 min, nanoparticle colloids are shown to be formed with surprisingly narrow size distributions and average dispersion as small as 15–20 nm. The average particle sizes range between 8 and 52 nm for gold and between 20 and 107 nm for silver. This parameter is shown to be stable and well-controlled by such laser parameters as intensity and effective irradiation time, as well as by the choice of the liquid phase. The possibilities of an efficient control over the proposed synthesis techniques are discussed, and the results of a bimetallic Au–Ag structure deposition from the obtained colloids are presented. The formation of the extended arrays of gold and silver nanoparticles with controlled morphology is examined. The changes in the optical properties of the obtained thin films are found to depend on their morphology, in particular, on the particle size, and distance between them

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“…On the other hand, for xenon, a lower yield (~0.5–0.7%) of EUV emission at 13.5 nm was found to be unacceptable for these applications . Tin has, however, been identified as a promising and energy‐efficient (~3–5% yield) plasma source for semiconductor lithographic applications …”

Section: Introductionmentioning

confidence: 99%

(TMT)_n clusters as dilute debris‐free tin source for generation of multiply charged tin ions of relevance in extreme ultraviolet (EUV) lithography, under intense laser irradiation

Sharma

Das

Vatsa

2018

Rapid Comm Mass Spectrometry

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Laser applications in nanotechnology: nanofabrication using laser ablation and laser nanolithography

Cited by 83 publications

References 460 publications

Metal Nanoparticles Deposited on Porous Silicon Templates as Novel Substrates for SERS

Metal Nanoparticles Deposited on Porous Silicon Templates as Novel Substrates for SERS

Reliable and well-controlled synthesis of noble metal nanoparticles by continuous wave laser ablation in different liquids for deposition of thin films with variable optical properties

(TMT)_n clusters as dilute debris‐free tin source for generation of multiply charged tin ions of relevance in extreme ultraviolet (EUV) lithography, under intense laser irradiation

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Laser applications in nanotechnology: nanofabrication using laser ablation and laser nanolithography

Cited by 83 publications

References 460 publications

Metal Nanoparticles Deposited on Porous Silicon Templates as Novel Substrates for SERS

Metal Nanoparticles Deposited on Porous Silicon Templates as Novel Substrates for SERS

Reliable and well-controlled synthesis of noble metal nanoparticles by continuous wave laser ablation in different liquids for deposition of thin films with variable optical properties

(TMT)n clusters as dilute debris‐free tin source for generation of multiply charged tin ions of relevance in extreme ultraviolet (EUV) lithography, under intense laser irradiation

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Product

Resources

About

(TMT)_n clusters as dilute debris‐free tin source for generation of multiply charged tin ions of relevance in extreme ultraviolet (EUV) lithography, under intense laser irradiation