This chapter describes the work principle, classification, and applications of the temperature sensing technologies used in laser micro/nanofabrication processes. These measurement techniques include contacting thermocouples, and noncontacting pyrometers, infrared thermal imaging, Langmuir probes, and thermoreflectance thermal imaging to monitor surface temperatures and electron temperatures in the plasma plume during laser processing. Factors to be considered for the selection of temperature sensing techniques, including temperature measurement range, resolution, measurement position, and accessibility, are discussed.