Abstract:Ultrathin (UT) crystalline Si wafers, which are more flexible than conventional ones, can apply to curved surfaces, enabling a wide range of applications such as building‐integrated photovoltaics, vehicle‐integrated photovoltaics, and wearable devices. Thinner wafers require more effective light trapping; thus, surface texturing in microscale is a common approach to compensate for the reduced thickness by enhancing the light pathlength. Microscale textures, however, deteriorate the mechanical flexibility due t… Show more
This work studies the impact of the Silicon (Si) loading effect induced by Deep Reactive Ion Etching (DRIE) of silicon master molds on the UV-nanoimprint lithography (NIL) patterning of nanofeatures....
This work studies the impact of the Silicon (Si) loading effect induced by Deep Reactive Ion Etching (DRIE) of silicon master molds on the UV-nanoimprint lithography (NIL) patterning of nanofeatures....
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.