Electronic Device Failure Analysis Technology Roadmap 2023
DOI: 10.31399/asm.tb.edfatr.t56090003
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Laser-Based, Photon, and Thermal Emission

Venkat Krishnan Ravikumar,
Kristofor Dickson,
Christian Boit

Abstract: This chapter assesses the capabilities and limitations of electric fault isolation (EFI) technology, the measurement challenges associated with new device architectures, and the pathways for improvement in emission microscopy, laser stimulation, and optical probing. It also assesses the factors that influence signal strength, spatial and timing resolution, and alignment accuracy between signal response images and the physical layout of the IC.

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