Laser Beam Scanning Based AR-Display Applying Resonant 2D MEMS Mirrors

Petrak, Oleg; Schwarz, Fabian; Pohl, Leon; Reher, Marcel; Janicke, Christian; Przytarski, Jan; Senger, Frank; Albers, Jörg; Giese, Thorsten; Ratzmann, Lars; Blicharski, Peter; Marauska, Stephan; Wantoch, Thomas von; Hofmann, Ulrich

doi:10.1117/12.2579695

Cited by 21 publications

(11 citation statements)

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“…This concept solves both of the aforementioned problems at once. Static parasitic reflection is no longer within the area of interest and reflection losses are minimized as the angle of incidence is perpendicular to the cap 13,14 . This unique packaging together with the low mechanical damping of the mirror motion enables OQmented MEMS scanners to achieve very large field of views: up to 180° FOV with 1D MEMS mirrors and up to 110°x65° FOV for 2D MEMS mirrors.…”

Section: Oqmented's Bi-resonant Mems Scanner Technologymentioning

confidence: 99%

Laser beam scanning-based 3D structured light scanner combining a bi-resonant MEMS mirror with low-cost imaging sensor

Zorlubas,

Akki,

Khan

et al. 2023

Digital Optical Technologies 2023

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This paper presents a technique of structured light 3D scanning based on Laser Beam Scanner (LBS) using a bi-resonant vacuum-packaged MEMS mirror and a low-cost imaging sensor. A single infrared continuous-wave laser source, together with the MEMS scanner, generates dynamic Lissajous patterns delivering a continuous increase of scan precision over time. A collimated laser beam is directly coupled with the MEMS mirror without the need for diffractive optics. Lissajous patterns are captured by a low-cost CMOS imaging sensor having a short integration time while a bandpass filter ensures that only infrared signals are detected from the camera. Due to the non-repeatability of the generated Lissajous patterns, all pixels of the sensed environment are illuminated within few consecutive images. The spatial depth resolution is defined by the sensor resolution, enabling very high-density 3D scans due to the high imaging resolution achievable by CMOS sensors. Advanced image processing algorithms are implemented to accurately calculate pixel-wise depth on taken images.The hardware complexity of the proposed system is significantly reduced compared to other 3D sensing solution, which leads to a lower bill of materials. All components are mass-producible and easy to assemble, making the system advantageous for high volume markets and suitable for integration into consumer products. The proposed 3D scanning system can be integrated in AR and MR headsets for use-cases such as hand gesture scanning and indoor SLAM. Due to its high resolution capability, the presented 3D scanning technique can also be used for facial scanning and avatar generation.

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Section: Oqmented's Bi-resonant Mems Scanner Technologymentioning

confidence: 99%

Laser beam scanning-based 3D structured light scanner combining a bi-resonant MEMS mirror with low-cost imaging sensor

Zorlubas,

Akki,

Khan

et al. 2023

Digital Optical Technologies 2023

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“…Microelectromechanical system (MEMS) scanning micromirrors have been drawn broad interests recently due to their potential applications in LiDAR 1-2 , 3D cameras [3][4][5] and VR/AR [6][7][8] . There are several types of MEMS micromirrors, including electromagnetic, electrostatic and electrothermal micromirrors [9][10] .…”

Section: Introductionmentioning

confidence: 99%

A Robust Lateral Shift Free (LSF) Electrothermal Micromirror With Flexible Multi-Morph Beams

Xie

Yang

Ren

et al. 2023

Preprint

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Electrothermal bimorph-based scanning micromirrors typically employ widely-used silicon dioxide (SiO2) as the electrical and thermal isolation material. However, due to the brittle nature of SiO2, such micromirrors may not be able to even survive a slight collision, which greatly limits their application range. To improve the robustness of electrothermal micromirrors, a polymer material is incorporated to partially replace SiO2 as the electrical and thermal isolation material as well as the anchor material. In particular, photosensitive polyimide (PSPI) is used to simplify the fabrication process. In this work, PSPI-based electrothermal micromirrors have been designed, fabricated and tested. The PSPI-type micromirrors achieved a maximum optical scan angle of ± 19.6 ° and a maximum vertical displacement of 370 µm both at only 4 Vdc. With a mirror aperture size of 1mm × 1 mm, the PSPI-type micromirrors withstood over 200 g accelerations from either vertical or lateral directions in the impact experiment. In the drop test, the PSPI-type micromirrors survived falls to a hard floor at heights up to 21 cm. In the standard frequency sweeping vibration test, the PSPI-type micromirrors withstood 21 g and 29 g acceleration in the vertical and lateral vibration, respectively. In all these experimental tests, the PSPI-type micromirrors demonstrated at least 4 times better robustness compared to the SiO2-type micromirrors fabricated in the same batch.

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“…LBS systems may employ either two 1D MEMS mirrors (one slow and one fast) [3] or a single 2D MEMS mirror [4,5]. The size of the MEMS mirrors needs to be well chosen considering various aspects like the total footprint of the scanning unit, the tilting or scanning angle of the mirror that defines the field of view (FOV), the resonance frequency that defines the scanning speed of the mirror and thus the image frame rate, and the size of the mirror that defines the optical beam size and thus the resolution of the display system.…”

Section: Introductionmentioning

confidence: 99%

Ultracompact RGB hybrid LD-SLED module based on micro-optics

Primerov,

Jobson,

Rios

et al. 2023

Digital Optical Technologies 2023

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We present, to the best of our knowledge, the first compact, full-color, hybrid RGB LD-SLED light source module designed for near-to-eye display systems. This module integrates a blue and green semiconductor laser diode (LD) at a wavelength of 453 nm and 520 nm, respectively, and a red superluminescent diode (SLED) at 639 nm in combination with a novel micro-optical, free-space architecture. The light source module includes circularizing optics, wavelengthcombining filters, and a single aspheric collimation lens. The light source module has a compact footprint of 7.7 mm x 10.8 mm and generates collimated, circular and collinearly aligned RGB beams with low divergence and large diameters in the range of 1.7 mm to 2.2 mm at the optical output. The current generation of this light source module delivers up to 15 mW of optical power per color, with a total power dissipation value of only 430 mW.

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Laser Beam Scanning Based AR-Display Applying Resonant 2D MEMS Mirrors

Cited by 21 publications

References 0 publications

Laser beam scanning-based 3D structured light scanner combining a bi-resonant MEMS mirror with low-cost imaging sensor

Laser beam scanning-based 3D structured light scanner combining a bi-resonant MEMS mirror with low-cost imaging sensor

A Robust Lateral Shift Free (LSF) Electrothermal Micromirror With Flexible Multi-Morph Beams

Ultracompact RGB hybrid LD-SLED module based on micro-optics

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