Laser Characterization of the Periodic Line-Space Micro/Nano Structures

Iancu, Ovidiu D.; Şchiopu, Paul; Manea, Adrian; Cristea, Ionica; Grosu, Neculai

doi:10.1109/isse.2007.4432884

Cited by 1 publication

(7 citation statements)

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“…The name SAW originates from the fact that, unlike to bulk wave, the amplitude of SAW, (10Å…30nm), attenuates exponentially with depth into the substrate [8]. Penetration depth of the wave into the substrate varies inversely proportional with the frequency.…”

Section: Saw Devices Technology Overviewmentioning

confidence: 99%

“…It is a need to reduce the size and weight of devices used in communications and remote sensing [8], [9]. Having in view that the wavelength of an acoustic wave, is 10 5 smaller than the wavelength of electromagnetic waves at the same frequency, SAW microdevices are inherently smaller than devices based on other techniques.…”

Section: Saw Devices Technology Overviewmentioning

confidence: 99%

“…The diffraction orders depend on the laser wavelength and dimension of the periodic line-space structures. From Fig.4 we find the relation for calculation of the distance of slits separation d [8]. …”

Section: Iwf-incident Wavefront Dwf-diffracted Wavefrontmentioning

confidence: 99%

“…This paper first highlights SAW devices technology overview before discussing optoelectronic techniques for characterization of SAW devices. A large variety of optical measurement techniques and methods for SAW devices have been proposed between others: knife-edge techniques [10], interferometric techniques [1] [2] [7], and diffraction techniques [1] [8]. Full information on the SAW field for a general broadband wave disturbance can be most simply obtained by real time detection, and the knife-edge and interferometric techniques have proved most successful for this.…”

Section: Introductionmentioning

confidence: 99%

“…Methods based on scattering of laser light from the periodic line-space structures have a great potential in practical application. One of them is presented in the paper [8]. The continuous advances in miniaturization and increasing integration densities technologies need in the same time high accuracy new methods and technique es for geometrical and multifunctional characterization of micro/nanodevices [11].…”

Section: Introductionmentioning

confidence: 99%

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Integration of optoelectronics and SAW technology

et al. 2010

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The number of radio frequency surface acoustic wave (SAW) filters produced presently exceeds 3 billion per year. The demand for high-frequency SAW filters for telecommunications and remote sensing, has led to extensive research, focusing on new SAW microdevices. SAW devices have shown compact structures, small size, low cost, high sensitivity and fast response. The need of miniaturized systems, with high sensitivity and low energy has motivated the need to integrate on the same substrate all the structure of SAW device and connecting electronic circuits. As a consequence, many types of methods of both constructive and operating characterization of SAW devices have been developed. This paper provides a short introduction regarding the developed level of SAW microdevices and describes the results of literature investigation research of optoelectronic techniques for constructive characterization of SAW microdevices. Further research will be done into the determination of SAW parameters such as the amplitude of surface wave, the velocity of wave propagation on the surface of the piezoelectric substrate. Substrates of quartz, lithium tantalite (LiTaO 3 ) and lithium niobate (LiNbO 3 ), are piezoelectric materials commonly used in manufacturing of SAW devices, but these materials are not compatible with the integrated circuit (IC) technology. Three optoelectronic measurement techniques are known for detection of surface acoustic waves: diffraction grating technique, the knife-edge technique, and the detection of ultrasonic vibrations using optical interferometry. The research work given in this paper concentrates on describing of optoelectronic techniques used for constructive characterization of SAW microdevices. Finally, we try to draw some conclusion where: optoelectronic techniques are predicted to be one of the fundamental measurement methods for measurement of future SAW microdevices.

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Section: Saw Devices Technology Overviewmentioning

confidence: 99%

Section: Saw Devices Technology Overviewmentioning

confidence: 99%

Section: Iwf-incident Wavefront Dwf-diffracted Wavefrontmentioning

confidence: 99%