Laser chemical vapor deposition of copper

Houle, Frances A.; Jones, Carol R.; Baum, Thomas H.; Pico, C.; Kovac, C. A.

doi:10.1063/1.95685

Cited by 102 publications

(18 citation statements)

References 25 publications

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“…plane by approximately AE 0.27 (1) . Despite the identical connectivity of all the Cu 12 clusters, the unsolvated molecules 2 and 3 have structures ( Figure 4) that are markedly different from that of 1 (Figure 3 bottom).…”

Section: Wwwchemeurjorgmentioning

confidence: 98%

“…The facile syntheses and the structures of five new Cu I alkynyl clusters, [Cu 12 A C H T U N G T R E N N U N G (hfac) 8 A C H T U N G T R E N N U N G (CCnPr) 4 A C H T U N G T R E N N U N G (thf) 6 ]·THF (1), [Cu 12 A C H T U N G T R E N N U N G (hfac) 8 10 A C H T U N G T R E N N U N G (hfac) 6 -A C H T U N G T R E N N U N G (C CtBu) 3 A C H T U N G T R E N N U N G (C CnPr)(diethyl ether)] (4) and [Cu 10 A C H T U N G T R E N N U N G (hfac) 6 A C H T U N G T R E N N U N G (C CtBu) 4 (diethyl ether)] (5) are reported, in which hfacH = 1,1,1,5,5,5-hexafluoropentan-2,4-dione. The first independent molecule found in the crystals of 4 (4 a) proved to be chemically identical to 5.…”

Section: Introductionmentioning

confidence: 99%

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Copper(I) Alkynyl Clusters, [Cu_x+y(hfac)_x(CCR)_y], with Cu₁₀–Cu₁₂ Cores

Baxter

Higgs

Bailey

et al. 2006

Chemistry A European J

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The facile syntheses and the structures of five new Cu(I) alkynyl clusters, [Cu(12)(hfac)(8)(C[triple chemical bond]CnPr)(4)(thf)(6)]xTHF (1), [Cu(12)(hfac)(8)(C[triple chemical bond]CtBu)(4)] (2), [Cu(12)(hfac)(8)(C[triple chemical bond]CSiMe(3))(4)] (3), [Cu(10)(hfac)(6)(C[triple chemical bond]CtBu)(4)(diethyl ether)]/[Cu(10)(hfac)(6)(C[triple chemical bond]CtBu)(3)(C[triple chemical bond]CnPr)(diethyl ether)] (4) and [Cu(10)(hfac)(6)(C[triple chemical bond]CtBu)(4)(diethyl ether)] (5) are reported, in which hfacH=1,1,1,5,5,5-hexafluoropentan-2,4-dione. The first independent molecule found in the crystals of 4 (4 a) proved to be chemically identical to 5. The Cu(10) and Cu(12) cores in these clusters are based on a central "square" Cu(4)C(4) unit. Whilst the connectivities of the Cu(10) or Cu(12) units remain identical the geometries vary considerably and depend on the bulk of the alkynyl group, weak coordination of ether molecules to copper atoms in the core and CuO intramolecular contacts formed between Cu-hfac units on the periphery of the cluster. Similar intermolecular contacts and interlocking of Cu-hfac units are formed in the simple model complex [Cu(2)(hfac)(2)(HC[triple chemical bond]CtBu)] (6). When linear alkynes, C(n)H(2n+1)C[triple chemical bond]CH, are used in the synthesis and non-coordinating solvents are used in the workup, further association of the Cu(4)C(4) cores occurs and clusters with more than eighteen copper atoms are isolated.

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Section: Wwwchemeurjorgmentioning

confidence: 98%

Section: Introductionmentioning

confidence: 99%

Copper(I) Alkynyl Clusters, [Cu_x+y(hfac)_x(CCR)_y], with Cu₁₀–Cu₁₂ Cores

Baxter

Higgs

Bailey

et al. 2006

Chemistry A European J

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“…The experimental setup has been described in various publications [7,8], Briefly, an Ar + laser (Spectra Physics 2020) operating at 514.5 nm was focused on a substrate in a stainless steel vacuum cell through a glass window. The precursor was held in a U-shaped evaporator.…”

Section: Methodsmentioning

confidence: 99%

“…Precursors that have been used for LCVD include Cu(hfa) z [7], Pt (hfa) 2 [8], CpPd (allyl) [9], and Me2Au(L)…”

Section: Pacs: 4260-v 8115 Ghmentioning

confidence: 99%

Laser-induced CVD of rhodium

1991

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Abstract. Stripes of rhodium metal were deposited by focusing an Ar + laser (514.5 nm) onto glass and polyimide substrates in a heated vacuum cell that contained Rh(CO)2acac vapor. Stripes were characterized by scanning profilometry, electrical resistivity, SEM and Auger measurements. Most stripes were 100-200 ~na wide and 1-3 gm high. Very broad stripes (> 500 ~tm) were deposited when the Rh(CO)2acac vapor pressure was greater than 1 Torr and when the laser power was more than 200 mW. Stripe resistivities were in general around 30 times that of the bulk material. Auger spectra show the presence of carbon in the stripes. PACS: 42.60-v, 81.15 GhIn direct laser writing a focused laser beam decomposes a metal-organic compound onto a substrate [1,2]. Translation of either the laser beam or the substrate results in the generation of a narrow stripe of metal on the substrate. Possible applications include compact hybrid packaging [3] and mask and circuit repair [1,4].As in other types of chemical vapor deposition (CVD) [5,6], the metal-organic precursor is of critical importance. Precursors that have been used for LCVD include Cu(hfa) z [7], Pt (hfa) 2 [8], CpPd (allyl) [9], and Me2Au(L)

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“…and from copper acetate using an Nd:YAG laser (Harish et al, 1988). Conducting films and lines have also been obtained by decomposing Cu(I1) (hfac), photothermally in the gas phase (Houle et al, 1985;Markwalder et al, 1989). However, the films were heavily contaminated with carbon.…”

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confidence: 99%