DOI: 10.1002/9780470294758.ch3
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Laser CVD System Design, Operation, and Modeling

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Cited by 3 publications
(1 citation statement)
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“…It allows superb spatial resolution (y5 mm) because the chemical reactions are restricted to the heated zone created by the focused laser spot, in contrast to the traditional CVD furnace which heats the entire surface of the substrate. 148 Laser CVD results in deposits with high purity, high degree of crystallinity, low porosity, excellent mechanical properties and thermal stability. These attributes are the result of deposition occurring one atom at a time.…”
Section: Laser Cvdmentioning
confidence: 99%
“…It allows superb spatial resolution (y5 mm) because the chemical reactions are restricted to the heated zone created by the focused laser spot, in contrast to the traditional CVD furnace which heats the entire surface of the substrate. 148 Laser CVD results in deposits with high purity, high degree of crystallinity, low porosity, excellent mechanical properties and thermal stability. These attributes are the result of deposition occurring one atom at a time.…”
Section: Laser Cvdmentioning
confidence: 99%