August 22, 1996This is a preprint of a paper intended for publication in a journal or proceedings. Since changes may be made before publication, this preprint is made available with the understanding that it will not be cited or reproduced without the permission of the author.
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ABSTRACTHafnia-silica multilayer mirrors and polarizers were deposited by e-beam evaporation onto BK7 glass substrates. The mirrors and polarizers were coated for operation at a wavelength of 1053 nm at 45° and at Brewster's angle (56°), respectively. They were tested with a single 3-ns laser pulse. The morphology of the laser-induced damage was characterized by optical and scanning electron microscopy. Four distinct damage morphologies were found: pits, flat bottom pits, scalds, and delaminates. The pits and flat bottom pits (< 30 µm in diameter) were detected at lower fluences (as low as 5 J/cm 2 ). The pits seemed to result from ejection of nodular defects by causing local enhancement of the electric field. Scalds and delaminates could be observed at higher fluences (above 13 J/cm 2 ) and seemed to result from the formation of plasmas on the surface. These damage types often originated at pits and were typically less than 300 µm in diameter; their size increased almost linearly with fluence. Finally, the effects of the damage on the characteristics of the beam (reflectivity degradation and phase modulations) were measured.