“…In polymers, optical propagation losses at around 1.3 to 1.55 m wavelength are caused by the vibration absorption overtone of the COH bond, and can be decreased by substituting hydrogen with a heavy atom such as deuterium, fluorine, and chlorine atom. 8 Recently, the low-loss polymeric waveguide devices were fabricated using deuterated fluoromethacyrate, 5,6 UV curable fluorinated acrylate, 3 deuterated polysioxane, 7 and fluorinated polyimides. 9,10 Fluorinated poly(arylene ethers) developed for interlayer dielectric materials 11,12 are good candidate materials for the optical waveguide devices due to their excellent thermal stability, mechanical properties, low moisture absorption, and low inherent optical absorption at the near-infrared region.…”