1993
DOI: 10.1126/science.262.5135.877
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Laser-Focused Atomic Deposition

Abstract: The ability to fabricate nanometer-sized structures that are stable in air has the potential to contribute significantly to the advancement of new nanotechnologies and our understanding of nanoscale systems. Laser light can be used to control the motion of atoms on a nanoscopic scale. Chromium atoms were focused by a standing-wave laser field as they deposited onto a silicon substrate. The resulting nanostructure consisted of a series of narrow lines covering 0.4 millimeter by 1 millimeter. Atomic force micros… Show more

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Cited by 406 publications
(228 citation statements)
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“…The understanding of the underlying interactions that govern the formation, packing arrangement and behavior of SAMs will provide answers to questions related to many technologically important areas. The observations presented here are motivated by the application of SAMs as resists in Cs beam atomic nanolithography [3][4][5][6][7][8]34].…”
Section: A Alkanethiol Packing Arrangements On Au{111} Surfacesmentioning
confidence: 99%
See 1 more Smart Citation
“…The understanding of the underlying interactions that govern the formation, packing arrangement and behavior of SAMs will provide answers to questions related to many technologically important areas. The observations presented here are motivated by the application of SAMs as resists in Cs beam atomic nanolithography [3][4][5][6][7][8]34].…”
Section: A Alkanethiol Packing Arrangements On Au{111} Surfacesmentioning
confidence: 99%
“…Such organosulfur monolayers now have numerous technological applications, the most recent of which involves their use as positive resists in atomic nano-fabrication [3][4][5][6][7][8]. This application has motivated a considerable research effort focusing on their structure, assembly mechanism and experimental parameter dependencies.…”
Section: Introductionmentioning
confidence: 99%
“…There has been, however, some evidence of laser cooling and manipulation of elements within Group 13: a beam of aluminium atoms [8,9], has been observed to narrow under laser irradiation and a deceleration force has been demonstrated in gallium [10] and indium atoms [11] with recent evidence of sub-Doppler transverse cooling in an indium atomic beam [12].…”
Section: Introductionmentioning
confidence: 99%
“…The fabrication of permanent nanostructures by laserfocused atomic deposition was first demonstrated using chromium atoms with laser light provided by a singlefrequency, stabilized dye laser operating with stilbene-3 laser dye and tuned near the 7 S 3 -7 P 4 0 transition at 425.6 nm [6]. In this work, a series of lines with width 65 nm, height 34 nm, and spacing 212.8 nm was fabricated, covering an area of 0.4 mm!1 mm.…”
Section: Laser-focused Atomic Depositionmentioning
confidence: 99%