2019
DOI: 10.1088/1361-6463/ab4828
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Laser-generated plasmas in length scales relevant for thin film growth and processing: simulation and experiment

Abstract: In pulsed laser deposition, thin film growth is mediated by a laser-generated plasma, whose properties are critical for controlling the film microstructure. The advent of 2D materials has renewed the interest in how this ablation plasma can be used to manipulate the growth and processing of atomically thin systems. For such purpose, a quantitative understanding of the density, charge state, and kinetic energy of plasma constituents is needed at the location where they contribute to materials processes. Here we… Show more

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Cited by 11 publications
(11 citation statements)
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“…Furthermore, the velocities of particles throughout the entire mass are close to the state of dynamic equilibrium aer collisions with each other. This situation conforms to the characteristics of the Maxwell velocity distribution, 6 and the relation is as follows: 13 nðr; tÞ z exp À r 2 4L R ðtÞ 2…”
Section: Plasma Expansion Modelssupporting
confidence: 70%
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“…Furthermore, the velocities of particles throughout the entire mass are close to the state of dynamic equilibrium aer collisions with each other. This situation conforms to the characteristics of the Maxwell velocity distribution, 6 and the relation is as follows: 13 nðr; tÞ z exp À r 2 4L R ðtÞ 2…”
Section: Plasma Expansion Modelssupporting
confidence: 70%
“…However, plasma expansion can be regarded as a whole gas mass, and the study of plasma expansion characteristics can be carried out. S. B. Harris et al 6 proposed an expansion model for laser ablation plasma and studied the length scale of laser-induced material growth and modification of the expansion distance. Z. Lin et al 7 used the finite-difference time-domain (FDTD) method to study the propagation properties of Gaussian beams in expanded plasma.…”
Section: Introductionmentioning
confidence: 99%
“…The effective model couples laser-induced surface evaporation with fluid plasma expansion [27,2,8]. The pertinent equations are expressed in 2D-axisymmetric coordinates.…”
Section: Model Detailsmentioning
confidence: 99%
“…For constraining considerations, it is instructive to convert the time axis used for n(t) into an energy axis defined by the transformation ε = m i (d/t) 2 /2, where m i is the mass of the ionic species comprising the plasma. The quantity ε is an approximate representation of the kinetic energy of such ions [8].…”
Section: Constraining the Simulations By Experimental Datamentioning
confidence: 99%
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