2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) 2023
DOI: 10.1109/inertial56358.2023.10103805
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Laser Induced Chemical Etching of Quartz for MEMS sensors fabrication

M. Sirota
1
,
B. Lipavsky
2
,
D. Nuttman
3
et al.
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