For the key-optical material, the laser induced damage character of fused silica is crucial for the application among the optical laser fitting. As the defect of each point of the silica sample is diverse, and the lasers focus point by point, we divided the sample block into three-dimensional structure for each laser-point to discuss the relationship between the LIDT of each points and the OH-content. The result shows that the LIDT of the center of the sample block is up to 10-11J/cm2 which is consistent after the treatment while the LIDT of border pieces is 9-10 J/cm2. The different temperature and the aggradation during the fusing process and the machine process caused the different OH content of different location of the sample.