Laser Induced Formation of Buried Void Layer in Silicon

Abstract

The Femtoprint project, a European project, aims at demonstrating the use of low-energy laser pulses (i.e. below the ablation threshold) to manufacture monolithically integrated devices including optofluidic, optomechanical and photonic devices. The longer-term objective is the implementation of a versatile table-top machining center. This paper summarizes the project progress to date and demonstrates the potential of this approach through various illustrative examples.