Laser-induced grayscale patterning in TeOx thin films

Dun, Aihuan; Ma, Xiaojun; Wei, Jingsong; Gan, Fuxi

doi:10.1016/j.matchemphys.2011.09.065

Cited by 3 publications

(1 citation statement)

References 28 publications

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“…Spot heating using laser pulses have been shown to generate pillars due to expansion of molten thermoplastic with some control of their size based on laser intensity, but suffers from large variances in feature morphology [15]. Grey-scale photolithography has been demonstrated in the creation of three-dimensional (3D) features, but is not widely utilized because of the need for specialized photomasks [13,14,16,17,18]. Material printing [18,19,20,21,22] and computer numerical controlled (CNC) micro machining [23] are becoming versatile options for rapid prototyping of 3D microfluidics.…”

Section: Introductionmentioning

confidence: 99%

One-Step Fabrication of Microchannels with Integrated Three Dimensional Features by Hot Intrusion Embossing

Debono

Voicu

Pousti

et al. 2016

Sensors

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We build on the concept of hot intrusion embossing to develop a one-step fabrication method for thermoplastic microfluidic channels containing integrated three-dimensional features. This was accomplished with simple, rapid-to-fabricate imprint templates containing microcavities that locally control the intrusion of heated thermoplastic based on their cross-sectional geometries. The use of circular, rectangular and triangular cavity geometries was demonstrated for the purposes of forming posts, multi-focal length microlense arrays, walls, steps, tapered features and three-dimensional serpentine microchannels. Process variables, such as temperature and pressure, controlled feature dimensions without affecting the overall microchannel geometry. The approach was demonstrated for polycarbonate, cycloolefin copolymer and polystyrene, but in principle is applicable to any thermoplastic. The approach is a step forward towards rapid fabrication of complex, robust, microfluidic platforms with integrated multi-functional elements.

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Section: Introductionmentioning

confidence: 99%

One-Step Fabrication of Microchannels with Integrated Three Dimensional Features by Hot Intrusion Embossing

Debono

Voicu

Pousti

et al. 2016

Sensors

View full text Add to dashboard Cite

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Laser Heat-Mode Grayscale Lithography

Wei

2019

Laser Heat-Mode Lithography

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Realizing multimodal lithography effects by adjusting laser exposure power ranges for TeO_x inorganic photoresist

Liu,

Zhao,

Wang

et al. 2024

Mater. Res. Express

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Suboxide chalcogenide thin films like TeO x are promising inorganic lithography materials. Different from previous reports of single-mode lithography based on TeO x films at low laser power, this study proposes multimodal lithography effects at low, medium, and high laser power ranges. The TeO x films were fabricated by reactive magnetron sputtering, exhibiting super smooth surface with an RMS 0.33 nm. The lithographic performance was researched using a laser direct writing system with a wavelength of 780 nm. The experiment results showed that different kind of lithographic patterns were achieved by changing laser power ranges. At low exposure powers (5 mW to 9 mW), TeO x film transforms from amorphous to crystalline, generating patterns with single-trench since only the crystalline state dissolves in alkaline developers. At medium exposure powers (10 mW to 15 mW), the center of the laser spot that has greater power turns the film from amorphous to crystalline and then back to amorphous due to the rapid quenching process, while the outer region cools slowly to form crystalline, resulting in the patterns with double-trenches, with feature size 119 nm (about 1/7 λ). At high exposure powers (>16 mW), the laser power is capable of ablating the TeO x film, resulting in the ablation and redeposition patterns. Therefore, multimodal lithographic nano-patterns on the same TeO x photoresist film can be realized with only one lithography process by precisely manipulating the laser power ranges, which has significant implications in the fields of nano-manufacturing and optical storage.

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Laser-induced grayscale patterning in TeOx thin films

Cited by 3 publications

References 28 publications

One-Step Fabrication of Microchannels with Integrated Three Dimensional Features by Hot Intrusion Embossing

One-Step Fabrication of Microchannels with Integrated Three Dimensional Features by Hot Intrusion Embossing

Laser Heat-Mode Grayscale Lithography

Realizing multimodal lithography effects by adjusting laser exposure power ranges for TeO_x inorganic photoresist

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Laser-induced grayscale patterning in TeOx thin films

Cited by 3 publications

References 28 publications

One-Step Fabrication of Microchannels with Integrated Three Dimensional Features by Hot Intrusion Embossing

One-Step Fabrication of Microchannels with Integrated Three Dimensional Features by Hot Intrusion Embossing

Laser Heat-Mode Grayscale Lithography

Realizing multimodal lithography effects by adjusting laser exposure power ranges for TeOx inorganic photoresist

Contact Info

Product

Resources

About

Realizing multimodal lithography effects by adjusting laser exposure power ranges for TeO_x inorganic photoresist