Laser-induced selective copper deposition on polyimide

Abstract

Laser irradiation of organometallic palladium compounds with an argon ion laser at 351 nm is used to selectively deposit catalytic amounts of palladium on polyimide. Subsequent immersion of the irradiated samples in an electroless copper solution results in copper deposition. Since a few monolayers of palladium are sufficient to catalyze the electroless copper process, fast writing speeds of several centimeters per second are obtained.

Laser-assisted deposition of thin films from gas-phase and surface-adsorbed molecules

“…Copper deposition has been achieved by using Cu(HFAc)2 [bis-(l,l,l,5,5,5-hexafluoro-2,4-pentanedionate)copper(II)] (Figure 4);149-163 gold deposition has employed Me2Au- (AcAc) [dimethylgold(III) acetylacetonate] and its two (AcAc)3 [iridium acetylacetonate];160 and palladium deposition has employed Pd(HFAcAc)2 (and films of PdAcAc and PdAc). 163 In this last study, spatially localized Pd thin films deposited on polyimide using 351 nm from an argon ion laser served as sites for further growth of copper by electroless deposition. In another AcAc study, Pt films were deposited from Pt(HFAcAc)2 in a hybrid mode, with only photodeposition occurring initially on the transparent substrate and then with pyrolytic deposition beginning only after the photodeposition of a thin, absorbing Pt film.20 Furthermore, in a related study162b it was shown that with a small increase in the laser-induced temperature rise, by a few tens of degrees, photolytic deposition of Pt went from being dominated by the photolysis of surface-adsorbed species to the photolysis of gas-phase Pt(HFAcAc)2 molecules.…”

Electroless copper plating obtained by Selective Metallisation using a Magnetic Field (SMMF)

“…Some additive selective metallisation techniques are based on selective catalysation of the surface and result in specific electroless metal deposition exclusively at the catalysed areas. Selective catalysation can be achieved by microcontact printing [10,11], ink-jet printing [12][13][14][15], or laser activation of the surface [16][17][18][19]. Although some techniques have found applications in electronics manufacturing, none of them have been able to completely replace the lithography process.…”

Micromachining compatible metal patterning technique using localized decomposition of an organometallic compound by laser irradiation

“…For this purpose, we studied the formation of metal pattern thin film through the localized decomposition of an organometallic compound by laser irradiation. Some papers have already reported that, using this technique, it is possible to form gold or palladium line patterns [1][2][3][4][5][6][7][8][9]. This paper will describe the localized decomposition process of palladium acetate, which has a relatively simple composition, on glass and polyimide substrates by laser irradiation, the characteristics of the formed palladium thin film and the geometrical features of the formed line patterns.…”