Laser intensity-based geometry control of periodic submicron polymer structures fabricated by laser interference lithography

Garliauskas, Mantas; Stankevičius, Evaldas; Račiukaitis, Gediminas

doi:10.1364/ome.7.000179

Cited by 18 publications

(6 citation statements)

References 35 publications

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“…Advanced stitching strategies were employed, yet these can only minimize the adverse effects of this technique [21,39]. Application of interference/structured beams [14] requires substantial changes in the optical layout of the 3DLL setup. Introduction of spatial light modulators (SLM) promised to make light structuring more flexible [15].…”

Section: Discussionmentioning

confidence: 99%

“…The femtosecond (fs) laser-based 3D laser lithography (3DLL) is the most precise and versatile of those [3,4] and was used to great effect in fields ranging from micromechanics [5,6] and biomedicine [7,8], to integrated micro optics [9,10] and photonics [11,12]. Additionally, tinkering with focusing properties [13], applying various interferometry techniques [14] or spatial light modulators [15] allows to tune the resolution and/or structuring rate. Combined with a huge variety of applicable materials [16][17][18] it makes 3DLL an extremely attractive method for advanced functional structure fabrication.…”

Section: Introductionmentioning

confidence: 99%

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Mesoscale laser 3D printing

et al. 2019

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3D meso scale structures that can reach up to centimeters in overall size but retain micro-or nano-features, proved to be promising in various science fields ranging from micro-mechanical metamaterials to photonics and bio-medical scaffolds. In this work, we present synchronization of the linear and galvanometric scanners for efficient femtosecond 3D optical printing of objects at the meso-scale (from sub-µm to sub-cm spanning five orders of magnitude). In such configuration, the linear stages provide stitch-free structuring at nearly limitless (up to tens-of-cm) working area, while galvo-scanners allow achieving translation velocities in the range of mm/s-cm/s without sacrificing nano-scale positioning accuracy and preserving the undistorted shape of the final print. The principle behind this approach is demonstrated, proving its inherent advantages in comparison to separate use of only linear stages or scanners. The printing rate is calculated in terms of voxels/s, showcasing the capability to maintain an optimal feature size while increasing throughput. Full capabilities of this approach are demonstrated by fabricating structures that reach millimeters in size but still retain sub-µm features: scaffolds for cell growth, microlenses, and photonic crystals. All this is combined into a benchmark structure: a meso-butterfly. Provided results show that synchronization of two scan modes is crucial for the end goal of industrial-scale implementation of this technology and makes the laser printing well aligned with similar approaches in nanofabrication by electron and ion beams.

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Section: Discussionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Mesoscale laser 3D printing

et al. 2019

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“…Considering the important application of the periodic micro-nano structures in photonic crystals [48,49], light-emitting diode devices [50], sensing and detection [51,52], a LIFT-based technology which could prepare the periodic structures efficiently would be necessary. Laser interference lithography (LIL) had been proved to be the technology with free-mask, large area, low cost and high efficiency in preparing of periodic micro-nano structures [53][54][55][56][57]. Therefore, combining the LIL and LIFT techniques, the laser interference induced forward transfer (LIIFT) was proposed by which the limitation of the printable materials could be broken through and the efficiency for preparation of periodic micro-structures could be promoted.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of periodic microscale stripes of silver by laser interference induced forward transfer and their SERS properties

et al. 2021

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The micro-stripe structure was prepared by laser interference induced forward transfer (LIIFT) technique, composed of Ag nano-particles (NPs). The effects of the film thickness with the carbon nano-particles mixed polyimide (CNPs@PI), Ag film thickness, and laser fluence were studied on the transferred micro-stripe structure. The periodic Ag micro-stripe with good resolution was obtained in a wide range of CNPs@PI film thickness from ~ 0.5 μm to ~ 1.0 μm for the Ag thin film ~ 20 nm. The distribution of the Ag NPs composing the micro-stripe was compact. Nevertheless, the average size of the transferred Ag NPs was increased from ~ 41 nm to ~ 197 nm with the change of the Ag donor film from ~ 10 nm to ~ 40 nm. With the increase of the laser fluence from 102 mJ•cm-2 to 306 mJ•cm-2 per-beam, the transferred Ag NPs became aggregative, improving the resolution of the corresponding micro-stripe. Finally, the transferred Ag micro-stripe exhibited the significant surface enhanced Raman scattering (SERS) property for rhodamine B (RhB). While the concentration of the RhB reached 10-10 mol•L-1, the Raman characteristic peaks of the RhB were still observed clearly at 622 cm-1, 1359 cm-1, and 1649 cm-1. These results indicate that the transferred Ag micro-stripe has potential application as a SERS chip in drug and food detection.

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“…Ultrafast lasers have been wildly applied in high-throughput microfabrication and patterning of metals , semiconductors 6,7 , and insulators [8][9][10][11] in science [12][13][14][15][16][17][18] , technology [19][20][21][22][23][24][25][26][27] , and medicine 28,29 . However, their industrial applications are restricted by the low laser machining rates and the high price of ultrashort laser irradiation sources.…”

Section: Introductionmentioning

confidence: 99%

Functional surface formation by efficient laser ablation using single-pulse and burst-modes

Žemaitis

Gaidys

Mikšys

et al. 2021

Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVI

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Surfaces inspired by nature and their replication find great interest in science, technology, and medicine due to their unique functional properties. This research aimed to develop an efficient laser milling technology using single-pulse-and burst-modes of irradiation to replicate bio-inspired structures over large areas at high speed. The ability to form the trapezoidal-riblets inspired by shark skin at high production speeds while maintaining the lowest possible surface roughness was demonstrated.

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Laser intensity-based geometry control of periodic submicron polymer structures fabricated by laser interference lithography

Cited by 18 publications

References 35 publications

Mesoscale laser 3D printing

Mesoscale laser 3D printing

Fabrication of periodic microscale stripes of silver by laser interference induced forward transfer and their SERS properties

Functional surface formation by efficient laser ablation using single-pulse and burst-modes

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