Laser Interference Lithography and Shadow Lithography for Fabricating Nanowires and Nanoribbons

Mok, Park Joong; Leung, Wai‐Yee; Constant, Kristen P.; Kim, Tae-Geun; Ho, Kai‐Ming

doi:10.5772/20620

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Systematic study of resonant transmission effects in visible band using variable depth gratings

Ushkov

Щербаков

Verrier

et al. 2019

Sci Rep

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The article focuses on depth-dependent visible band transmission effects in a symmetrical “insulator-metal-insulator” diffraction system based on a variable depth grating. These effects were studied both experimentally and theoretically in TM and TE polarizations. In particular, the existence of an optimized grating depth for plasmon-mediated resonant transmission was confirmed experimentally, and differences in TE and TM transmission behavior are discussed. We utilize a simple and flexible fabrication approach for rapid synthesis of apodized structures with adiabatically varying depth based on a beat pattern of two interferential lithography exposures. The present study can be useful in the fields of transmission-based optical security elements and biosensors.

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