Laser interferometric dilatometer at low temperatures: application to fused silica SRM 739

Okaji, Masahiro; Yamada, Naofumi; Nara, Koichi; Kato, Hidemi

doi:10.1016/0011-2275(95)96887-r

Cited by 48 publications

(24 citation statements)

References 9 publications

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“…At cryogenic temperatures, the laser interferometric study of Okagi et al [52] showed that α of SRM 739 is negative. Combining the SRM 739 studies and integrating gives density up to the glass transition.…”

Section: Literature Values Of Heat Capacity Density and Thermal Expmentioning

confidence: 98%

“…On the expanded scale (right side): solid line = type I glass; circles = crystalline α-quartz; squares = β-quartz; gray diamonds = cristobalite. (b) Thermal expansivity (left axis) data are: X =SRM 739 from Okagi et al [52]. Dots=SRM 739; Plus sign=type I; diamonds =type III, all from Kikuchi et al [50].…”

Section: Literature Values Of Heat Capacity Density and Thermal Expmentioning

confidence: 99%

See 1 more Smart Citation

Effects of hydration, annealing, and melting on heat transport properties of fused quartz and fused silica from laser-flash analysis

Hofmeister¹,

Whittington

2012

Journal of Non-Crystalline Solids

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Section: Literature Values Of Heat Capacity Density and Thermal Expmentioning

confidence: 98%

Section: Literature Values Of Heat Capacity Density and Thermal Expmentioning

confidence: 99%

Effects of hydration, annealing, and melting on heat transport properties of fused quartz and fused silica from laser-flash analysis

Hofmeister¹,

Whittington

2012

Journal of Non-Crystalline Solids

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“…2) since published values of the fused silica CTE near room temperature differ slightly, perhaps due to SiO 2 purity issues. 18 The best-fit result is that the TSG spacer zero-crossing point T S is in the range of 16 to 20 C, limited by the uncertainty in the CTE of the fused silica substrate. Thus the model indicates that the spacer zero crossing T S is approximately 38 to 42 K higher than the optical cavity's turning point of -22 C. Temperature (C) Table 1.…”

Section: Cavity Temperature Dependencementioning

confidence: 98%

Fabry-Perot temperature dependence and surface-mounted optical cavities

Fox

2008

SPIE Proceedings

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Factors that contribute to the temperature dependence of a resonant frequency in a low-expansion optical cavity are discussed, including deformation at the cavity ends due to different coefficients of thermal expansion (CTE) of the spacer, optically-contacted mirror substrate and coating. A model of the temperature dependence is presented that incorporates finite-element-analysis of the cavity ends. A measurement of frequency versus temperature of a cavity mode is used along with the model to deduce a spacer's CTE versus temperature profile. The measured profile correlates very well with a separate experiment utilizing a temporary surface-mounted Fabry-Perot cavity fabricated on the outside of the spacer with hydroxy-catalysis bonding.

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“…The system is based on two key technologies. One is an optical heterodyne interferometer, which is the type of interferometer that provides the highest resolution [2][3][4][5] because it detects a change in sample length as a phase difference in light. The other is a double-path interferometer, which increases the sensitivity to changes in length by a factor of four and cancels out the tilt of a sample during measurement.…”

Section: Goal Of Our Researchmentioning

confidence: 99%

High-precision (<1ppb/°C) optical heterodyne interferometric dilatometer for determining absolute CTE of EUVL materials

2006

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We have developed an optical-heterodyne-interferometric dilatometer tailored to meet EUVL requirements. The key feature is that it can measure the absolute coefficient of thermal expansion (CTE). The design of the dilatometer has been optimized to yield highly accurate, reproducible measurements by taking into consideration uncertainty factors and their contributions. A prototype was constructed and evaluated. To test its capabilities, we measured the CTEs of various materials, which had values ranging from ppm/°C to ppb/°C. All the measurements were successful, and we found that our dilatometer could handle a wide variety of materials, including low-thermal-expansion materials (LTEMs) for EUVL. Subsequently, a more detailed evaluation of the reproducibility of CTE measurements for titanium-doped silica glass was performed. The static reproducibility (σ) was 0.80 ppb/°C or better for a change of 1 ppb/°C in the target. The dynamic reproducibility, or in other words the resetability, was ±0.85 ppb/°C or better. Regarding measurement accuracy, our results are comparable to those obtained with the AIST dilatometer. From the first results, the CTE difference between AIST and ASET was 1.7 ppb/°C. We continue to improve accuracy of measurement. As a test of capability of our dilatometer, we made a CTE characterization for material development. It showed typical CTE character of LTEMs. We feel confident that our dilatometer will be useful for the measurement of the CTEs of EUVLgrade LTEMs.

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Laser interferometric dilatometer at low temperatures: application to fused silica SRM 739

Cited by 48 publications

References 9 publications

Effects of hydration, annealing, and melting on heat transport properties of fused quartz and fused silica from laser-flash analysis

Effects of hydration, annealing, and melting on heat transport properties of fused quartz and fused silica from laser-flash analysis

Fabry-Perot temperature dependence and surface-mounted optical cavities

High-precision (<1ppb/°C) optical heterodyne interferometric dilatometer for determining absolute CTE of EUVL materials

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