Laser interferometric nanolithography using a new positive chemical amplified resist

This article presents nano-slit electrospray emitters fabricated by a micro-to nanofluidic via technology. The main advantage of the technology is the ability to position freely suspended nanochannels anywhere on a microfluidic chip, where leak-tight delivery of fluid from a fluid reservoir can be established through long microchannels. The technology has proven to be useful in creating electrospray emitters coupled to freely suspended microchannels. It was observed that filling of nanochannels through via connections with integrated microchannels occurs not only due to bulk capillary action. These observations lead to a redesign of the electrospray chips. Repeatable electrospray IV-curves could be obtained from fabricated nano-slit electrospray emitters. Moreover, integration of on-chip microfluidic components is one of the possibilities of the fluidic via technology presented.

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“…Nano-lithographical methods (e.g. Luttge et al 2007) can be applied to integrate nanochannels with even smaller dimensions.…”

Section: Micro-to Nanofluidic Via Technologymentioning

confidence: 99%

Nano-slit electrospray emitters fabricated by a micro- to nanofluidic via technology

Dijkstra

Berenschot

Boer

et al. 2012

Microfluid Nanofluid

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“…We tested this model on patterned media prepared by laser interference lithography (LIL) [Haast et al, 1998]. BPM fabricated by LIL form excellent test media because the interference patterns have perfect positioning [Luttge et al, 2007]. Random translations, such as in self-assembled or e-beam generated media, are therefore absent, and the fluctuations in the position of the islands are caused by shape fluctuations only.…”

Section: Introductionmentioning

confidence: 99%

Magnetic interactions in 2D and 3D arrays

Alink¹

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“…Therefore a second fabrication method was developed [195] that can result in a higher dot density. A new trilayer resist system is used for which the process scheme is depicted on the right of figure 4.6.…”

Section: Pre-patterning By Reactive Ion Etchingmentioning

confidence: 99%

Field emission sensing for non-contact probe recording

Febre¹

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Cover:In the micro scanning probe array memory (µSPAM) concept, magnetic probes are used to write and read on a patterned recording medium. A single probe consists of a sharp tip on a flexible cantilever, that is used to detect the small magnetic forces from its bending. By maintaining a constant current of electrons, field emitted from the probe tip to the conducting medium, the distance between the tip apex and the patterned sample can be controlled, also when scanning over the medium surface. For experimental demonstration of this method, we used a scanning probe microscope mounted inside an ultra-high vacuum system, which is depicted on the back cover. FIELD EMISSION SENSING FOR NON-CONTACT PROBE RECORDING AbstractIn probe recording an array of thousands of nanometer-sharp probes is used to write and read on a storage medium. By using micro-electromechanical system technology (MEMS) for fabrication, small form factor memories with high data density and low power consumption can be obtained. Such a system is expected to offer a promising route towards extremely high-density recording, with bits of several nanometer or even atomic size. To reach these densities, individual control over the position of the probes is essential, to be able to operate the probes in non-contact as is for instance done in scanning tunneling microscopy (STM).At the MESA + Institute for Nanotechnology at the University of Twente, we currently investigate the possibilities of probe recording using a magnetic medium. In the micro scanning probe array memory (µSPAM) concept, an array of magnetic probes is used to write and read on a patterned recording medium. In such a probe storage system, there is also a need to position individual probes at several nanometers above the recording medium, to be able to detect the small magnetic forces. For this non-contact operation, individual z-feedback should be achieved by integration of an actuator, proximity sensor and feedback loop for each probe of the probe array. As reported in literature, the fabrication of probe arrays and integration of actuators and logic circuitry have already been proven to be attainable, however current research still lacks a proximity sensor with sufficient lateral resolution that can be integrated in each probe.The objective of this thesis is to investigate whether field-emission can be used as an integrated method to control probe-medium distance for non-contact probe recording. Field emission can be used as a proximity sensing method, since the emission current varies exponentially with the electric field, which in turn is proportional to the electrode gap. The lateral resolution is determined by the probe tip radius, on the same order as the targeted bit size of about 10 nm. The signal to noise ratio is not affected by the small sensing area, which is an important advantage over other sensing methods. Moreover it provides an elegant solution for the problem of sensor integration in each probe of the array, since only one wire per probe is needed to connect to the...

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Laser interferometric nanolithography using a new positive chemical amplified resist

Cited by 20 publications

References 8 publications

Nano-slit electrospray emitters fabricated by a micro- to nanofluidic via technology

Nano-slit electrospray emitters fabricated by a micro- to nanofluidic via technology

Magnetic interactions in 2D and 3D arrays

Field emission sensing for non-contact probe recording

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