Laser Micromachining of Lithium Niobate-Based Resonant Sensors towards Medical Devices Applications

Abstract

This paper presents a micromachining process for lithium niobate (LiNbO3) material for the rapid prototyping of a resonant sensor design for medical devices applications. Laser micromachining was used to fabricate samples of lithium niobate material. A qualitative visual check of the surface was performed using scanning electron microscopy. The surface roughness was quantitatively investigated using an optical surface profiler. A surface roughness of 0.526 μm was achieved by laser micromachining. The performance of the laser-micromachined sensor has been examined in different working environments and different modes of operation. The sensor exhibits a Quality-factor (Q-factor) of 646 in a vacuum; and a Q-factor of 222 in air. The good match between the modelling and experimental results shows that the laser-micromachined sensor has a high potential to be used as a resonance biosensor.

High-resolution probe design for measuring the dielectric properties of human tissues

“…A flexible and stretchable antenna for bio-integrated electronics [ 27 ] has been recently developed, which uses new elastic materials to replace traditional rigid materials. Additionally, there are some rapid fabrication of these antennas such as laser micromachining technology [ 28 ] and laser-induced graphene [ 29 ]. In order to solve the limitations of the probe designed in this article, we will consider using these advanced materials and technologies to optimize the probe in the follow-up, so that the probe can be used in complex parts of the human body.…”

Detecting Collagen Molecules at Picogram Level through Electric Field-Induced Accumulation

“…Lithium niobate (LN) is a rhombohedral crystal belonging to the point group 3 m. Thanks to its unique optical, electronic and physical properties, LN has a wide range of applications such as nonlinear optical devices, compact pyroelectric sources of x-rays, piezoelectric resonance biosensors to name but a few. The only obstacle in the way of its growing industrial use expensive high-quality mechanical elaboration of LN samples is currently reduced due to implementation of micromachining CNC (Computer Numerically Controlled) [ 31 ] and laser micromachining [ 32 ] techniques.…”

Dimensional Analysis of Double-Track Microstructures in a Lithium Niobate Crystal Induced by Ultrashort Laser Pulses

“…The precise fabrication of micro-and nano-scale structures in LiNbO 3 has many applications in micro-optics, micro-electromechanical systems (MEMS) [9], and plasmonics [10]. It can also be used to manufacture sensors [11]. These key techniques take advantage of the ultrafast nature and high peak power of femtosecond laser pulses to generate precise and localized modifications within the crystal, showcasing the potential of femtosecond laser writing for precise manipulation and processing of lithium niobate.…”